Effective two-dimensional pattern generation for self-aligned double patterning
Ihara, Takeshi, Takahashi, Atsushi, Kodama, Chikaaki
Published in 2015 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2015)
Published in 2015 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2015)
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Conference Proceeding
A fast algorithm for rectilinear block packing based on selected sequence-pair
Fujiyoshi, Kunihiro, Kodama, Chikaaki, Ikeda, Akira
Published in Integration (Amsterdam) (01.04.2007)
Published in Integration (Amsterdam) (01.04.2007)
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Journal Article
Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation
Tomioka, Yoichi, Matsunawa, Tetsuaki, Kodama, Chikaaki, Nojima, Shigeki
Published in 2017 22nd Asia and South Pacific Design Automation Conference (ASP-DAC) (01.01.2017)
Published in 2017 22nd Asia and South Pacific Design Automation Conference (ASP-DAC) (01.01.2017)
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Conference Proceeding
A fast process variation and pattern fidelity aware mask optimization algorithm
Awad, Ahmed, Takahashi, Atsushi, Tanaka, Satoshi, Kodama, Chikaaki
Published in 2014 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) (01.11.2014)
Published in 2014 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) (01.11.2014)
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Conference Proceeding
Subresolution Assist Feature Generation With Supervised Data Learning
Xu, Xiaoqing, Lin, Yibo, Li, Meng, Matsunawa, Tetsuaki, Nojima, Shigeki, Kodama, Chikaaki, Kotani, Toshiya, Pan, David Z.
Published in IEEE transactions on computer-aided design of integrated circuits and systems (01.06.2018)
Published in IEEE transactions on computer-aided design of integrated circuits and systems (01.06.2018)
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Journal Article
A fast manufacturability aware Optical Proximity Correction (OPC) algorithm with adaptive wafer image estimation
Awad, Ahmed, Takahashi, Atsushi, Kodama, Chikaaki
Published in 2016 Design, Automation & Test in Europe Conference & Exhibition (DATE) (01.03.2016)
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Published in 2016 Design, Automation & Test in Europe Conference & Exhibition (DATE) (01.03.2016)
Conference Proceeding
Journal Article
Self-Aligned Double and Quadruple Patterning Aware Grid Routing Methods
Kodama, Chikaaki, Ichikawa, Hirotaka, Nakayama, Koichi, Nakajima, Fumiharu, Nojima, Shigeki, Kotani, Toshiya, Ihara, Takeshi, Takahashi, Atsushi
Published in IEEE transactions on computer-aided design of integrated circuits and systems (01.05.2015)
Published in IEEE transactions on computer-aided design of integrated circuits and systems (01.05.2015)
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Journal Article
Grid-based Self-Aligned Quadruple Patterning aware two dimensional routing pattern
Ihara, Takeshi, Hongo, Toshiyuki, Takahashi, Atsushi, Kodama, Chikaaki
Published in 2016 Design, Automation & Test in Europe Conference & Exhibition (DATE) (01.03.2016)
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Published in 2016 Design, Automation & Test in Europe Conference & Exhibition (DATE) (01.03.2016)
Conference Proceeding
Journal Article