Effects of N Doping in Ru-Ta on Barrier Property and Reliability Performance for Cu Interconnects
Torazawa, Naoki, Hinomura, Tooru, Hirao, Shuji, Kobori, Etsuyoshi, Korogi, Hayato, Matsumoto, Susumu
Published in ECS journal of solid state science and technology (01.01.2016)
Published in ECS journal of solid state science and technology (01.01.2016)
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Journal Article
SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING SAME
MATSUMOTO, SUSUMU, TARUMI, NOBUAKI, TETANI, MICHINARI, HIRANO, HIROSHIGE, HAMADA, MASAKAZU, KOBORI, ETSUYOSHI
Year of Publication 28.08.2014
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Year of Publication 28.08.2014
Patent