Shower plate having projections and plasma CVD apparatus using same
TSUJI NAOTO, KOBAYASHI TAMIHIRO, ARAI HIROKI, MORISADA YOSHINORI, FUKUDA HIDEAKI
Year of Publication 21.09.2010
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Year of Publication 21.09.2010
Patent
Shower plate having projections and plasma CVD apparatus using same
Tsuji, Naoto, Fukuda, Hideaki, Arai, Hiroki, Morisada, Yoshinori, Kobayashi, Tamihiro
Year of Publication 21.09.2010
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Year of Publication 21.09.2010
Patent
Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus
KOBAYASHI TAMIHIRO, KANEUCHI KUNIHIRO, YAMAGISHI TAKAYUKI, WATANABE AKIRA
Year of Publication 06.04.2010
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Year of Publication 06.04.2010
Patent