SPUTTERING EQUIPMENT
KIM, CHANG SU, SON, JANG HO, KOO, BON OK, KIM, YOUNG KYU, KO, HYUN KUK
Year of Publication 01.02.2007
Get full text
Year of Publication 01.02.2007
Patent
FABRICATION METHOD OF A GATE ELECTRODE HAVING A METAL LAYER PATTERN
SON, JANG HO, KIM, SUNG MAN, KOO, BON OK, SEO, JU HYUNG, KO, HYUN KUK
Year of Publication 30.01.2007
Get full text
Year of Publication 30.01.2007
Patent
CRYOPUMP
SON, JANG HO, KIM, DAE KIL, KOO, BON OK, KIM, YOUNG KYU, KO, HYUN KUK
Year of Publication 03.01.2007
Get full text
Year of Publication 03.01.2007
Patent
VACUUM SYSTEM OF A APPARATUS OF MANUFACTURING A SEMICONDUCTOR SUBSTRATE AND MONITORING METHOD OF THE SAME
SON, JANG HO, KOO, BON OK, PARK, IN SUN, HA, JAE GYU, KIL, JUNG HWAN, KO, HYUN KUK
Year of Publication 02.01.2007
Get full text
Year of Publication 02.01.2007
Patent
Filtering technique for CVD chamber process gases and the same apparatus
KOO, KYUNG-BUM, KIM, JU-WAN, KO, HYUN-KUK, KIM, YOUNG-ROE, KIM, HYUN-YOUNG
Year of Publication 01.06.2004
Get full text
Year of Publication 01.06.2004
Patent
SEMICONDUCTOR MANUFACTURING EQUIPMENT AND COOLING METHOD OF SHOWERHEAD USING THE SAME
SON, JANG HO, KIM, SUNG MAN, KOO, BON OK, LEE, KI JONG, SEO, JU HYUNG, KIM, YOUNG KYU, KO, HYUN KUK
Year of Publication 30.01.2007
Get full text
Year of Publication 30.01.2007
Patent
Filtering technique for CVD chamber process gases
KIM YOUNG-ROE, KIM JU-WAN, KOO KYUNG-BURN, KIM HYONG-SOO, KIM HYUN-YOUNG, PARK DONGAN, NA DONG-GEUN, KO HYUN-KUK
Year of Publication 11.12.2001
Get full text
Year of Publication 11.12.2001
Patent