Verfahren zum Materialabtrag an Festkörpern
BLAESI, BENEDIKT, PETERS, MARIUS, KNORZ, ANNEROSE, PREU, RALF, HAUSER, HUBERT
Year of Publication 02.02.2012
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Year of Publication 02.02.2012
Patent
Device, used to process planar workpieces e.g. mono-or polycrystalline semiconductor ingot, comprises processing unit having processing laser, optical detection unit, and control and/or regulating unit, where laser passes to workpiece
JETTER, VOLKER, STROHM, PETER TIM, KNORZ, ANNEROSE, REIN, STEFAN, CARL, DANIEL
Year of Publication 07.11.2013
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Year of Publication 07.11.2013
Patent