Chapter 23 - Porous Silicon Based MEMS
Müller, Gerhard, Friedberger, Alois, Knese, Kathrin
Published in Handbook of Silicon Based MEMS Materials and Technologies (2016)
Published in Handbook of Silicon Based MEMS Materials and Technologies (2016)
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Method for producing a component, and sensor element
BENZEL HUBERT, KNESE KATHRIN, SCHUERMANN GREGOR, KRAMER TORSTEN, SCHELLING CHRISTOPH, ARMBRUSTER SIMON
Year of Publication 10.09.2013
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Year of Publication 10.09.2013
Patent
Method for manufacturing capped MEMS components
BENZEL HUBERT, KNESE KATHRIN, KRAFT KARL-HEINZ, KRAMER TORSTEN, ARMBRUSTER SIMON
Year of Publication 25.06.2013
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Year of Publication 25.06.2013
Patent
SENSORELEMENT ZUR RELATIVDRUCKMESSUNG UND HERSTELLUNGSVERFAHREN
KNESE, KATHRIN, ARMBRUSTER, SIMON, SCHELLING, CHRISTOPH, SCHUERMANN, GREGOR, BENZEL, HUBERT, KRAMER, TORSTEN
Year of Publication 15.03.2012
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Year of Publication 15.03.2012
Patent
Sensor element for measuring relative pressure and method of manufacture
KNESE, KATHRIN, ARMBRUSTER, SIMON, SCHELLING, CHRISTOPH, SCHUERMANN, GREGOR, BENZEL, HUBERT, KRAMER, TORSTEN
Year of Publication 29.02.2012
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Year of Publication 29.02.2012
Patent
Porous Silicon Based MEMS
Lindroos Veikko, Lehto Ari, Tilli Markku, Motooka Teruaki
Published in Handbook of Silicon Based MEMS Materials and Technologies (2010)
Published in Handbook of Silicon Based MEMS Materials and Technologies (2010)
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