Hammer test to detect BEOL process marginalities on via chains in advanced nodes
Mahalingam, Anbu Selvam Km, Silvestre, Mary Claire, Ramanathan, Eswar, Ordonio, Christopher, Schaller, John
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Effect of top corner rounding in BEOL to yield in advanced technologies
Ramanathan, Eswar, Silvestre, Mary Claire, Mahalingam, Anbu Selvam Km, Garg, Niti, Siddhartha, Siddhartha, Ordonio, Christopher, Schaller, John
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Vertical natural capacitor time dependent dielectric breakdown (TDDB) improvement in 28nm
Silvestre, Mary Claire, Wenyi, Zhang Galor, Selvam, Km Mahalingam Anbu, Ramanathan, Eswar, Ordonio, Christopher, Schaller, John, Lee Jong Hyup, Capasso, Cristiano, Justison, Patrick
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Devices and methods of reducing damage during BEOL M1 integration
Km Mahalingam, Anbu Selvam, Child, Jr., Craig Michael, Chandrashekar, Ashwini
Year of Publication 02.07.2019
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Year of Publication 02.07.2019
Patent
Detect, Understand and Fix Starburst Defect at Via Litho Film Stacks
Sun, Zhiguo, Ramanathan, Eswar, Silvestre, Mary Claire, Xu, Tingge, Chauhan, Kripa, Rana, Vijaya, Shepard, Joseph, Seshachalam, Vijayalakshmi, Wang, Minrui, Mahalingam, Anbu Selvam KM, Lee, Yang Bum
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
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Conference Proceeding
Multidirektionale selbstausgerichtete Mehrfachstrukturierung
BOMBARDIER, Colin, He, Ming, Chauhan, Vikrant, Km Mahalingam, Anbu Selvam, Donegan, Keith
Year of Publication 23.03.2023
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Year of Publication 23.03.2023
Patent
10nm local interconnect challenge with iso-dense loading and improvement with ALD spacer process
Ming He, Ordonio, Christopher, Chun Hui Low, Welti, Peter, Lobb, Granger, Clancy, Aleksandra, Shu, Jeff, Hamouda, Ayman, Stephens, Jason, Shah, Ketan, Chandrasekhar, Ashwini, Silvestre, Mary Claire, Periasamy, Prakash, Mahalingam, Anbu Selvam Km, Pal, Shyam, Child, Craig
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
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Conference Proceeding
Journal Article
MULTI-DIRECTIONAL SELF-ALIGNED MULTIPLE PATTERNING
BOMBARDIER, COLIN, MAHALINGAM ANBU SELVAM KM, CHAUHAN, VIKRANT, HE, MING, DONEGAN, KEITH
Year of Publication 04.12.2018
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Year of Publication 04.12.2018
Patent
Multidirektionale selbstausgerichtete Mehrfachstrukturierung
BOMBARDIER, Colin, He, Ming, Chauhan, Vikrant, Km Mahalingam, Anbu Selvam, Donegan, Keith
Year of Publication 29.11.2018
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Year of Publication 29.11.2018
Patent
Multi-directional self-aligned multiple patterning
He, Ming, KM Mahalingam, Anbu Selvam, Bombardier, Colin, Chauhan, Vikrant, Donegan, Keith
Year of Publication 05.02.2019
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Year of Publication 05.02.2019
Patent
MULTI-DIRECTIONAL SELF-ALIGNED MULTIPLE PATTERNING
He, Ming, KM Mahalingam, Anbu Selvam, Bombardier, Colin, Chauhan, Vikrant, Donegan, Keith
Year of Publication 29.11.2018
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Year of Publication 29.11.2018
Patent
Substrate structure with spatial arrangement configured for coupling of surface plasmons to incident light
He, Ming, KM Mahalingam, Anbu Selvam, Bombardier, Colin, Donegan, Keith P, Ramanathan, Eswar, Sarad, Jeric, Takmeel, Qanit, Ghosh, Somnath, Periasamy, Prakash, Chandrashekar, Ashwini
Year of Publication 17.12.2019
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Year of Publication 17.12.2019
Patent
DEVICES AND METHODS OF REDUCING DAMAGE DURING BEOL M1 INTEGRATION
KM MAHALINGAM Anbu Selvam, CHILD, JR. Craig Michael, CHANDRASHEKAR Ashwini
Year of Publication 24.08.2017
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Year of Publication 24.08.2017
Patent
SUBSTRATE STRUCTURE WITH SPATIAL ARRANGEMENT CONFIGURED FOR COUPLING OF SURFACE PLASMONS TO INCIDENT LIGHT
He, Ming, KM Mahalingam, Anbu Selvam, Bombardier, Colin, Donegan, Keith P, Ramanathan, Eswar, Sarad, Jeric, Takmeel, Qanit, Ghosh, Somnath, Periasamy, Prakash, Chandrashekar, Ashwini
Year of Publication 08.08.2019
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Year of Publication 08.08.2019
Patent
Multi-directional self-aligned multiple patterning
BOMBARDIER, COLIN, KM MAHALINGAM, ANBU SELVAM, CHAUHAN, VIKRANT, HE, MING, DONEGAN, KEITH
Year of Publication 21.10.2020
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Year of Publication 21.10.2020
Patent
DEVICES WITH CHAMFER-LESS VIAS MULTI-PATTERNING AND METHODS FOR FORMING CHAMFER-LESS VIAS
WEI, Andy, STEPHENS, Jason Eugene, ZALESKI, Mark, KM MAHALINGAM, Anbu Selvam, PAL, Shyam, BOUCHE, Guillaume, AUGUR, Roderick Alan, HU, Xiang, CHILD, JR., Craig Michael, PERMANA, David Michael, SEHGAL, Akshey, JANG, Linus
Year of Publication 09.08.2018
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Year of Publication 09.08.2018
Patent
Multi-directional self-aligned multiple patterning
BOMBARDIER, COLIN, KM MAHALINGAM, ANBU SELVAM, CHAUHAN, VIKRANT, HE, MING, DONEGAN, KEITH
Year of Publication 01.03.2019
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Year of Publication 01.03.2019
Patent
Devices with chamfer-less vias multi-patterning and methods for forming chamfer-less vias
JANG, LINUS, BOUCHE, GUILLAUME, HU, XIANG, WEI, ANDY, SEHGAL, AKSHEY, KM MAHALINGAM, ANBU SELVAM, AUGUR, RODERICK ALAN, CHILD JR., CRAIG MICHAEL, STEPHENS, JASON EUGENE, ZALESKI, MARK, PAL, SHYAM, PERMANA, DAVID MICHAEL
Year of Publication 21.10.2019
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Year of Publication 21.10.2019
Patent
Devices with chamfer-less vias multi-patterning and methods for forming chamfer-less vias
JANG, LINUS, BOUCHE, GUILLAUME, HU, XIANG, WEI, ANDY, SEHGAL, AKSHEY, KM MAHALINGAM, ANBU SELVAM, AUGUR, RODERICK ALAN, CHILD JR., CRAIG MICHAEL, STEPHENS, JASON EUGENE, ZALESKI, MARK, PAL, SHYAM, PERMANA, DAVID MICHAEL
Year of Publication 16.12.2018
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Year of Publication 16.12.2018
Patent
DEVICES WITH CHAMFER-LESS VIAS MULTI-PATTERNING AND METHODS FOR FORMING CHAMFER-LESS VIAS
MARK ZALESKI, JASON EUGENE STEPHENS, CRAIG MICHAEL CHILD JR, AKSHEY SEHGAL, SHYAM PAL, XIANG HU, DAVID MICHAEL PERMANA, ANDY WEI, RODERICK ALAN AUGUR, ANBU SELVAM KM MAHALINGAM, GUILLAUME BOUCHE, LINUS JANG
Year of Publication 24.08.2018
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Year of Publication 24.08.2018
Patent