Method for joining semiconductor components with a flexible support band comprises moving an endless band parallel to the running direction of the support band between heating elements and the components
KUNZE, WOLFRAM, POENITZ, VOLKER, KLOOS, MATTHIAS, BERGMANN, DIETER, BIERL, STEFAN
Year of Publication 08.06.2006
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Year of Publication 08.06.2006
Patent
Transportmittel und Vakuumbeschichtungsanlage für Substrate unterschiedlicher Größe
STRUEMPFEL, JOHANNES.NAT, KLOOS, MATTHIAS, WOLF, ANDREJ, POLLACK, GERD
Year of Publication 31.05.2012
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Year of Publication 31.05.2012
Patent
Substrate treatment plant for treating e.g. glass substrate, has flap valve installed at vertical chamber wall or bulkhead wall, that is selectively opened and closed through opening for allowing passage of substrates
STRUEMPFEL, JOHANNES, KLOOS, MATTHIAS, WOLF, ANDREJ, SMOLKE, MATTHIAS
Year of Publication 22.03.2012
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Year of Publication 22.03.2012
Patent
Transportation device for transportation of plate-like substrates into substrate treatment plant, has rollers supported with end in rotary bearings, where rotary bearings are arranged in common bearing bank, which is coolable
KLOOS, MATTHIAS, PUENSCH, THOMAS, HEINRICH, HANS-JUERGEN, HENTSCHEL, MICHAEL
Year of Publication 12.01.2012
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Year of Publication 12.01.2012
Patent
Substratbehandlungsanlage
STRUEMPFEL, JOHANNES, ZINDLER, MATTHIAS, KLOOS, MATTHIAS, WOLF, ANDREJ, SMOLKE, MATTHIAS
Year of Publication 29.12.2011
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Year of Publication 29.12.2011
Patent
Vakuumbeschichtungsanlage in modularer Bauweise
STRUEMPFEL, JOHANNES, KLOOS, MATTHIAS, WOLF, ANDREJ, SMOLKE, MATTHIAS
Year of Publication 15.12.2011
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Year of Publication 15.12.2011
Patent
Substrate treatment system comprises system chamber comprising inlet lock before output lock and transportation device for transportation of substrates from inlet lock to output lock within system chamber, and heating device
STRUEMPFEL, JOHANNES, KLOOS, MATTHIAS, WOLF, ANDREJ, SMOLKE, MATTHIAS, HENTSCHEL, MICHAEL
Year of Publication 17.11.2011
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Year of Publication 17.11.2011
Patent
Adhesive application device for flexible tape-like substrates for microchip modules has straightedge elements for spreading adhesive fed to areas of surface that are moved parallel to surface above and/or below template type device
MONSER, HANS-PETER, KLOOS, MATTHIAS, HOCHMANN, SVEN, FISCHENICH, GUNTER, BERGMANN, DIETER
Year of Publication 04.05.2005
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Year of Publication 04.05.2005
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Cooling unit of a continuous treatment plant for disc-shaped substrates comprises a substrate transport device, an upper cooling system having fins with front-end air outlet nozzles, and a lower cooling system having fins
JAEGER, REINHARD, KLOOS, MATTHIAS, WOLF, ANDREJ, SMOLKE, MATTHIAS, WAYDBRINK, HUBERTUS, VON DER
Year of Publication 02.02.2012
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Year of Publication 02.02.2012
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