Method of determining a contact area size between 3D structures in an integrated semiconductor sample and use thereof, computer program product, and semiconductor inspection device
AVISHAI, AMIR, BUXBAUM, ALEX, KLOCHKOV, DMITRY, FOCA, EUGEN, LEE, KEUM-SIL, KORB, THOMAS
Year of Publication 01.03.2023
Get full text
Year of Publication 01.03.2023
Patent
Segmentation or cross sections of high aspect ratio structures
NEUMANN, JENS TIMO, SRIKANTHA, ABHILASH, KLOCHKOV, DMITRY, FREYTAG, ALEXANDER, PERSCH, JOHANNES, TOEPPE, ENO, KORB, THOMAS
Year of Publication 16.02.2023
Get full text
Year of Publication 16.02.2023
Patent
METHOD OF DETERMINING A CONTACT AREA SIZE BETWEEN 3D STRUCTURES IN AN INTEGRATED SEMICONDUCTOR SAMPLE AND USE THEREOF, COMPUTER PROGRAM PRODUCT, AND SEMICONDUCTOR INSPECTION DEVICE
AVISHAI, AMIR, BUXBAUM, ALEX, LEE, KEUMSIL, KLOCHKOV, DMITRY, FOCA, EUGEN, KORB, THOMAS
Year of Publication 11.12.2022
Get full text
Year of Publication 11.12.2022
Patent
No apparent accretion mode changes detected in Cen X-3
Müller, Daniela, Klochkov, Dmitry, Santangelo, Andrea, Mihara, Tatehiro, Sugizaki, Mutsumi
Published in arXiv.org (02.11.2011)
Published in arXiv.org (02.11.2011)
Get full text
Paper
Journal Article
Method and apparatus for measuring semiconductor features for increased yield
NEWMAN JON T, POSCH, J ¨ 1 RGEN, KOLB TRISTAN, AVISHAI, ALI, FOURCAT, EMMANUELLE, FREITAG ANDREAS, KLOCHKOV DMITRY, MARKKI, OLLI, BUXBAUM ANDREW
Year of Publication 02.08.2024
Get full text
Year of Publication 02.08.2024
Patent
Contact region sizing between three-dimensional structures in integrated semiconductor sample
FOCCA EMANUELE, KORB THOMAS, BUXBAUM ANDREAS, KLOCHKOV DMITRY, AVISHEH, ALI, LEE KEVIN
Year of Publication 10.06.2022
Get full text
Year of Publication 10.06.2022
Patent
FIB-SEM 3d tomography for measuring shape deviations of HAR structures
BUXBAUM ANDREAS, KLOCHKOV DMITRY, KOLB TOBIAS, AVISHEH, ALI, FERKA EMILY, LEE KEVIN
Year of Publication 07.06.2022
Get full text
Year of Publication 07.06.2022
Patent
Simultaneous fits in ISIS on the example of GRO J1008-57
Kühnel, Matthias, Müller, Sebastian, Kreykenbohm, Ingo, Fritz-Walter Schwarm, Grossberger, Christoph, Dauser, Thomas, Pottschmidt, Katja, Ferrigno, Carlo, Rothschild, Richard E, Klochkov, Dmitry, Staubert, Rüdiger, Wilms, Jörn
Published in arXiv.org (06.05.2016)
Published in arXiv.org (06.05.2016)
Get full text
Paper
Journal Article
Method of wafer inspection
AVISHAI, AMIR, BUXBAUM, ALEX, KLOCHKOV, DMITRY, FOCA, EUGEN, LEE, KEUM-SIL, KORB, THOMAS
Year of Publication 16.03.2022
Get full text
Year of Publication 16.03.2022
Patent
Method of cross-section imaging of an inspection volumes in wafer
NEUMANN, JENS TIMO, HUYNH, CHUONG, BUXBAUM, ALEX, NIU, BAOHUA, KLOCHKOV, DMITRY, FOCA, EUGEN, KORB, THOMAS
Year of Publication 01.01.2022
Get full text
Year of Publication 01.01.2022
Patent
Method, computer program product, semiconductor inspection device of obtaining a 3d volume image of an integrated semiconductor sample
NEUMANN, JENS TIMO, AVISHAI, AMIR, BUXBAUM, ALEX, LEE, KEUMSIL, SCHULMEYER, INGO, FOCA, EUGEN, KLOCHKOV, DMITRY, KORB, THOMAS
Year of Publication 01.09.2022
Get full text
Year of Publication 01.09.2022
Patent
Contact area size determination between 3D structures in an integrated semiconductor sample
AVISHAI, AMIR, BUXBAUM, ALEX, KLOCHKOV, DMITRY, FOCA, EUGEN, LEE, KEUM-SIL, KORB, THOMAS
Year of Publication 16.09.2021
Get full text
Year of Publication 16.09.2021
Patent
FIB-SEM 3D tomography for measuring shape deviations of HAR structures
AVISHAI, AMIR, BUXBAUM, ALEX, KLOCHKOV, DMITRY, FOCA, EUGEN, LEE, KEUM-SIL, KORB, THOMAS
Year of Publication 01.09.2021
Get full text
Year of Publication 01.09.2021
Patent
Analyzing X-Ray Pulsar Profiles: Geometry and Beam Pattern of EXO 2030+375
Sasaki, Manami, Klochkov, Dmitry, Kraus, Ute, Caballero, Isabel, Santangelo, Andrea
Published in arXiv.org (27.04.2010)
Published in arXiv.org (27.04.2010)
Get full text
Paper
Journal Article
The Goodness of Simultaneous Fits in ISIS
Kühnel, Matthias, Falkner, Sebastian, Grossberger, Christoph, Ballhausen, Ralf, Dauser, Thomas, Fritz-Walter Schwarm, Kreykenbohm, Ingo, Nowak, Michael A, Pottschmidt, Katja, Ferrigno, Carlo, Rothschild, Richard E, Martínez-Núñez, Silvia, José Miguel Torrejón, Fürst, Felix, Klochkov, Dmitry, Staubert, Rüdiger, Kretschmar, Peter, Wilms, Jörn
Published in arXiv.org (06.05.2016)
Published in arXiv.org (06.05.2016)
Get full text
Paper
Journal Article
CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION ACCURACY
NEUMANN JENS TIMO, KORB THOMAS, AVISHAI AMIR, KLOCHKOV DMITRY, SCHULMEYER INGO, BUXBAUM ALEX, FOCA EUGEN, LEE KEUMSIL
Year of Publication 18.01.2022
Get full text
Year of Publication 18.01.2022
Patent
METHOD FOR CHARACTERISING AT LEAST ONE OPTICAL COMPONENT OF A PROJECTION LITHOGRAPHY SYSTEM
EHM, Dirk Heinrich, KORB, Thomas, KRUITHOF, Wilbert, KLOCHKOV, Dmitry
Year of Publication 28.03.2019
Get full text
Year of Publication 28.03.2019
Patent