Method and apparatus for the production of thin film coatings
FENG BAO, SHULL ANDREW G, TAHER MAHMOUD, KLEPPER CONRAD C, CARLSON ERIC P
Year of Publication 06.07.2010
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Year of Publication 06.07.2010
Patent
Method and apparatus for the production of thin film coatings
Feng, Bao, Taher, Mahmoud, Shull, Andrew G, Carlson, Eric P, Klepper, Conrad C
Year of Publication 06.07.2010
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Year of Publication 06.07.2010
Patent
Method and apparatus for the production of thin film coatings
FENG BAO, SHULL ANDREW G, TAHER MAHMOUD, KLEPPER CONRAD C, CARLSON ERIC P
Year of Publication 05.10.2006
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Year of Publication 05.10.2006
Patent