Characterization of Doped Oxide Films PSG/BPSG/FSG via DSIMS in Order to Eliminate Nonzero Kilometer Failures from Semiconductors Used in Automotive Industry : Topic/category: Yield Enhancment/Advanced Metrology
Budri, Thanas, Klatt, Jeffrey
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
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Conference Proceeding
Semiconductor Film Stack Interface Investigation via DSIMS & TOFSIMS Depth Profiling and HAXPES : Yield Enhancement/Learning
Budri, Thanas, Klatt, Jeffrey, Chung, Jayhoon, Clubb, Aaron, Mann, Jennifer, Artyushkova, Kateryna
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
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Conference Proceeding
Bipolar NPN ICEO leakage due to PETEOS deposition
Klatt, Jeffrey, Arsenault, Scott, Budri, Thanas
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding
D & TOF-SIMS failure analysis of P-buried layer from BiCMOS transistors
Budri, Thanas, Sehgal, Akshey, Arsenault, Scott, Klatt, Jeffrey, Noort, Wibo Van, Ruby, Scott, Ramdani, Jamal, Allard, Paul, Schnieders, Albert
Published in Surface and interface analysis (01.01.2011)
Published in Surface and interface analysis (01.01.2011)
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Journal Article
Conference Proceeding
Developing a high volume manufacturing method to eliminate P Buried Layer implant defects
Sehgal, Akshey, Budri, Thanas, Klatt, Jeffrey, Printy, Craig, Ruby, Scott, Ramdani, Jamal
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
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Conference Proceeding