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Year of Publication 20.04.2016
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Year of Publication 20.04.2016
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TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
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Year of Publication 16.02.2012
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Year of Publication 16.02.2012
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Mo-w target and manufacturing method thereof
MA, WENPING, KIYOTA, JUNYA, TAKEI, MASAKI, SAKAMOTO, JUNICHI, MATSUMOTO, HIROSHI, NITTA, JUNICHI
Year of Publication 21.09.2017
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Year of Publication 21.09.2017
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THIN FILM FORMING METHOD
KIYOTA JUNYA, ISHIBASHI AKIRA, AKAMATSU YASUHIKO, OISHI YUICHI, ARAI MAKOTO
Year of Publication 26.02.2009
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Year of Publication 26.02.2009
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THIN FILM TRANSISTOR, OXIDE SEMICONDUCTOR FILM AND SPUTTERING TARGET
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Year of Publication 31.07.2018
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Year of Publication 31.07.2018
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OXIDE-SINTERED-BODY SPUTTERING TARGET AND MANUFACTURING METHOD THEREFOR
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Year of Publication 31.07.2018
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Year of Publication 31.07.2018
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SPUTTERING APPARATUS AND SPUTTERING METHOD
OTANI YUSUKE, KIYOTA JUNYA, ISHIBASHI AKIRA, ONO ATSUSHI, HORISHITA YOSHIKUNI, SHIROGANE NOBUTOSHI, KASAI MASATO, ARAI MAKOTO, NAGANO SHINPEI
Year of Publication 27.09.2012
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Year of Publication 27.09.2012
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MAGNET UNIT FOR MAGNETRON SPUTTERING ELECTRODE AND SPUTTERING APPARATUS
KIYOTA JUNYA, SATO YOSHIKATSU, SATO SHIGEMITSU, ISOBE TATSUNORI, ARAI MAKOTO, KURATA TAKAOMI
Year of Publication 23.06.2011
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Year of Publication 23.06.2011
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Method for producing a photo-mask
MIMURA, TOSHIFUMI, KIYOTA, JUNYA, SUZUKI, TOSHIHIRO, NAKAMURA, KYUZO, TANI, NORIAKI
Year of Publication 21.05.2015
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Year of Publication 21.05.2015
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Magnetron sputtering apparatus and magnetron sputtering method
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Year of Publication 17.07.2012
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Year of Publication 17.07.2012
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Magnetron sputtering apparatus and magnetron sputtering method
KIYOTA JUNYA, KOBAYASHI MOTOSHI, AKAMATSU YASUHIKO, YUKAWA TOMIYUKI, OISHI YUUICHI, NAKAMURA KYUZO, TAKEI MASAKI, ISHIBASHI SATORU, ARAI MAKOTO
Year of Publication 17.07.2012
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Year of Publication 17.07.2012
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MAGNETRON SPUTTERING ELECTRODE, AND SPUTTERING SYSTEM PROVIDED WITH MAGNETRON SPUTTERING ELECTRODE
KIYOTA JUNYA, AKAMATSU YASUHIKO, KOMATSU TAKASHI, ISOBE TATSUNORI, ARAI MAKOTO
Year of Publication 05.06.2008
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Year of Publication 05.06.2008
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MAGNETRON SPUTTERING ELECTRODE, AND SPUTTERING SYSTEM PROVIDED WITH MAGNETRON SPUTTERING ELECTRODE
KIYOTA JUNYA, AKAMATSU YASUHIKO, KOMATSU TAKASHI, ISOBE TATSUNORI, ARAI MAKOTO
Year of Publication 05.06.2008
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Year of Publication 05.06.2008
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Substrate processing apparatus and film forming apparatus
OHNO, TETSUHIRO, TSUKIKAWA, YOSHIZUMI, TAKEI, MASAKI, ISOBE, TATSUNORI, KIYOTA, JUNYA, TATEKAWA, SHINSUKE, ARAI, SUSUMU
Year of Publication 21.03.2017
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Year of Publication 21.03.2017
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