Preparation of poly-si by excimer laser annealing with solidification process control
Noguchi, Shigeru, Kuwahara, Takashi, Hanafusa, Hiroshi, Nakano, Shoichi, Kuriyama, Hiroyuki, Kiyama, Seiichi
Published in Electronics & communications in Japan. Part 2, Electronics (1993)
Published in Electronics & communications in Japan. Part 2, Electronics (1993)
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Journal Article
Improvement in a-Si:H properties by inert gas plasma treatment
MARUYAMA, E, HISHIKAWA, Y, TANAKA, M, KIYAMA, S, TSUDA, S
Published in Japanese journal of applied physics (1997)
Published in Japanese journal of applied physics (1997)
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Journal Article