Protective film structure of metal member, metal component employing protective film structure, and equipment for producing semiconductor or flat-plate display employing protective film structure
Ohmi, Tadahiro, Shirai, Yasuyuki, Morinaga, Hitoshi, Kawase, Yasuhiro, Kitano, Masafumi, Mizutani, Fumikazu, Ishikawa, Makoto, Kishi, Yukio
Year of Publication 28.02.2012
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Year of Publication 28.02.2012
Patent
Protective film structure of metal member, metal component employing protective film structure, and equipment for producing semiconductor or flat-plate display employing protective film structure
SHIRAI YASUYUKI, MIZUTANI FUMIKAZU, OHMI TADAHIRO, KAWASE YASUHIRO, KITANO MASAFUMI, ISHIKAWA MAKOTO, MORINAGA HITOSHI, KISHI YUKIO
Year of Publication 28.02.2012
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Year of Publication 28.02.2012
Patent
METAL OXIDE FILM, LAMINATE, METAL MEMBER AND PROCESS FOR PRODUCING THE SAME
KITANO, MASAFUMI, ISHIKAWA, MAKOTO, MORINAGA, HITOSHI, OHMI, TADAHIRO, KAWASE, YASUHIRO, SHIRAI, YASUYUKI, MIZUTANI, FUMIKAZU
Year of Publication 04.01.2012
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Year of Publication 04.01.2012
Patent
Member for a Plasma Processing Apparatus and Method of Manufacturing the Same
OHMI TADAHIRO, SATOU KEISUKE, KITANO MASAFUMI, TSUTAI YOSHIHUMI, IGUCHI MABITO
Year of Publication 23.04.2009
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Year of Publication 23.04.2009
Patent
Valve for Vacuum Exhaustion System
OHMI TADAHIRO, IKEDA NOBUKAZU, MORIMOTO AKIHIRO, KITANO MASAFUMI, YAMAJI MICHIO
Year of Publication 22.01.2009
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Year of Publication 22.01.2009
Patent
Valve for vacuum exhaustion system
OHMI TADAHIRO, IKEDA NOBUKAZU, MORIMOTO AKIHIRO, KITANO MASAFUMI, YAMAJI MICHIO
Year of Publication 06.01.2009
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Year of Publication 06.01.2009
Patent
Valve for vacuum exhaustion system
Ohmi, Tadahiro, Ikeda, Nobukazu, Yamaji, Michio, Kitano, Masafumi, Morimoto, Akihiro
Year of Publication 06.01.2009
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Year of Publication 06.01.2009
Patent
STRUCTURAL MEMBER FOR PLASMA TREATMENT SYSTEM AND METHOD FOR MANUFACTURE THEREOF
OHMI TADAHIRO, SATOU KEISUKE, KITANO MASAFUMI, TSUTAI YOSHIHUMI, IGUCHI MABITO
Year of Publication 22.12.2008
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Year of Publication 22.12.2008
Patent
Diaphragm valve for the vacuum exhaustion system
Ohmi, Tadahiro, Ikeda, Nobukazu, Yamaji, Michio, Kitano, Masafumi, Morimoto, Akihiro
Year of Publication 26.08.2008
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Year of Publication 26.08.2008
Patent
Diaphragm valve for the vacuum exhaustion system
OHMI TADAHIRO, IKEDA NOBUKAZU, MORIMOTO AKIHIRO, KITANO MASAFUMI, YAMAJI MICHIO
Year of Publication 26.08.2008
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Year of Publication 26.08.2008
Patent