Dependence of Thermal Decomposition of Metal Organic Gases on Metal Surface for Gas Distribution System
Yamashita, Satoru, Watanuki, Kohei, Ishii, Hidekazu, Shiba, Yoshinobu, Kitano, Masafumi, Shirai, Yasuyuki, Sugawa, Shigetoshi, Ohmi, Tadahiro
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
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Journal Article
Decomposition Characteristics of Metal-Organic Materials of Ga Doped Zinc Oxide for Evaluation as MOCVD Precursor
Yamashita, Satoru, Watanuki, Kohei, Ishii, Hidekazu, Kitano, Masafumi, Shirai, Yasuyuki, Ohmi, Tadahiro
Published in Meeting abstracts (Electrochemical Society) (05.02.2010)
Published in Meeting abstracts (Electrochemical Society) (05.02.2010)
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Journal Article
Valve for vacuum exhaustion system
OHMI TADAHIRO, IKEDA NOBUKAZU, MORIMOTO AKIHIRO, KITANO MASAFUMI, YAMAJI MICHIO
Year of Publication 02.08.2011
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Year of Publication 02.08.2011
Patent
Valve for vacuum exhaustion system
Ohmi, Tadahiro, Ikeda, Nobukazu, Yamaji, Michio, Kitano, Masafumi, Morimoto, Akihiro
Year of Publication 02.08.2011
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Year of Publication 02.08.2011
Patent
Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window
GOTO TETSUYA, MATSUOKA TAKAAKI, SHIRAI YASUYUKI, OHMI TADAHIRO, MURAKAWA SHIGEMI, KITANO MASAFUMI, WATANUKI KOHEI, HIRAYAMA MASAKI
Year of Publication 05.11.2013
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Year of Publication 05.11.2013
Patent
METAL OXIDE FILM, LAMINATE, METAL MEMBER AND PROCESS FOR PRODUCING THE SAME
SHIRAI YASUYUKI, MIZUTANI FUMIKAZU, OHMI TADAHIRO, KAWASE YASUHIRO, KITANO MASAFUMI, ISHIKAWA MAKOTO, MORINAGA HITOSHI
Year of Publication 04.10.2012
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Year of Publication 04.10.2012
Patent
Metal oxide film, laminate, metal member and process for producing the same
SHIRAI YASUYUKI, MIZUTANI FUMIKAZU, OHMI TADAHIRO, KAWASE YASUHIRO, KITANO MASAFUMI, ISHIKAWA MAKOTO, MORINAGA HITOSHI
Year of Publication 26.06.2012
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Year of Publication 26.06.2012
Patent
Metal oxide film, laminate, metal member and process for producing the same
Ohmi, Tadahiro, Shirai, Yasuyuki, Morinaga, Hitoshi, Kawase, Yasuhiro, Kitano, Masafumi, Mizutani, Fumikazu, Ishikawa, Makoto
Year of Publication 26.06.2012
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Year of Publication 26.06.2012
Patent
Reactor for Moisture Generation
HIRAO KEIJI, KAWADA KOJI, OHMI TADAHIRO, IKEDA NOBUKAZU, MORIMOTO AKIHIRO, MINAMI YUKIO, SAKAMOTO SHINJI, KITANO MASAFUMI
Year of Publication 05.04.2012
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Year of Publication 05.04.2012
Patent