Vacuum processing apparatus, and a film deposition apparatus and a film deposition method both using the vacuum processing apparatus
NISHITANI EISUKE, OKAMOTO AKIRA, YONEOKA YUJI, SHIMAMURA HIDEAKI, KISIMOTO SATOSI, TSUZUKU SUSUMU, KOBAYASHI SHIGERU
Year of Publication 09.01.2001
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Year of Publication 09.01.2001
Patent
Vacuum processing device and film forming device and method using same
NISHITANI; EISUKE, OKAMOTO; AKIRA, YAMAMOTO; MASASHI, KISIMOTO; SATOSI, SHIDA; HIROYUKI, KATO; TOKIO, SHIMAMURA; HIDEAKI, YONEOKA; YUJI, TANIGAKI; YUKIO, TSUZUKU; SUSUMU, MATSUBARA; SUNAO, KOBAYASHI; SHIGERU
Year of Publication 29.09.1998
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Year of Publication 29.09.1998
Patent
Vacuum processing equipment, film coating equipment and deposition method
NISHITANI; EISUKE, OKAMOTO; AKIRA, YAMAMOTO; MASASHI, KISIMOTO; SATOSI, SHIDA; HIROYUKI, KATO; TOKIO, SHIMAMURA; HIDEAKI, YONEOKA; YUJI, TANIGAKI; YUKIO, TSUZUKU; SUSUMU, MATSUBARA; SUNAO, KOBAYASHI; SHIGERU
Year of Publication 13.01.1998
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Year of Publication 13.01.1998
Patent
Vakuumverarbeitungsapparatur und Vakuumverarbeitungsverfahren
NISHITANI, EISUKE, YOKOHAMA, KANAGAWA, JP, KOBAYASHI, SHIGERU, HIRATSUKA, KANAGAWA, JP, TSUZUKU, SUSUMU, TOKIO/TOKYO, JP, KISIMOTO, SATOSI, YOKOHAMA, KANAGAWA, JP, OKAMOTO, AKIRA, CHIGASAKI, KANAGAWA, JP, SHIMAMURA, HIDEAKI, YOKOHAMA, KANAGAWA, JP, YONEOKA, YUJI, YOKOHAMA, KANAGAWA, JP
Year of Publication 21.04.1994
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Year of Publication 21.04.1994
Patent