Measurement of residual stress in DLC films prepared by plasma-based ion implantation and deposition
Oka, Yoshihiro, Kirinuki, Michiharu, Nishimura, Yoshimi, Azuma, Kingo, Fujiwara, Etsuo, Yatsuzuka, Mitsuyasu
Published in Surface & coatings technology (02.08.2004)
Published in Surface & coatings technology (02.08.2004)
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Journal Article
Conference Proceeding
Negative pulsed voltage discharge and DLC preparation in PBIID system
Kirinuki, Michiharu, Onoi, Masahiro, Nishikawa, Keiichi, Oka, Yoshihiro, Azuma, Kingo, Fujiwara, Etsuo, Yatsuzuka, Mitsuyasu
Published in Thin solid films (26.05.2006)
Published in Thin solid films (26.05.2006)
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Journal Article
Negative pulsed voltage discharge and DLC preparation in PBIID system
KIRINUKI, Michiharu, ONOI, Masahiro, NISHIKAWA, Keiichi, OKA, Yoshihiro, AZUMA, Kingo, FUJIWARA, Etsuo, YATSUZUKA, Mitsuyasu
Published in Thin solid films (2006)
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Published in Thin solid films (2006)
Conference Proceeding