Design Modification to Mitigate Ethylene Glycol Corrosion Risk in Dry Etching Machine
Gozali, Rendy Wiyogo, Shiang, Loh Kim, Rajkumar, Thiruchelvam, Butiu, Joselito
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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Conference Proceeding
Eliminating Polymer Flaking on a Passivation Etch Chamber using Carbon Polymer Coating Method
Igana, Noel Portes, Gozali, Rendy Wiyogo, Shiang, Loh Kim, Haiqing, Zhang
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
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Conference Proceeding