Semiconductor factory automation system and method for transporting semiconductor wafers
WOO-KYU LEE, KWANG-HO LEE, JONG-MO AHN, JIN-SUN KIM, TAE-HO LEE, WON-SOO CHO, CHANG-KEE HONG, MOON-GI KIM, YUNG-HWAN CHAE
Year of Publication 13.08.2003
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Year of Publication 13.08.2003
Patent
Transporting semiconductor wafers in a factory automation system
WOO-KYU LEE, KWANG-HO LEE, JONG-MO AHN, JIN-SUN KIM, TAE-HO LEE, WON-SOO CHO, CHANG-KEE HONG, MOON-GI KIM, YUNG-HWAN CHAE
Year of Publication 20.12.2000
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Year of Publication 20.12.2000
Patent