Organometallic adduct compounds and method of manufacturing integrated circuit device using the same
KOIDE TAKANORI, UCHIUZOU HIROYUKI, HARANO KAZUKI, PARK GYU HEE, TAKAHIRO YOSHII, FUSE WAKANA, CHO YOUN JOUNG, KIM JAE WOON, KIM YOUN SOO, AOKI YUTATO, RYU SEUNG MIN, SAITO KAZUYA, MANABE YOSHIKI, KIMURA MASAYUKI
Year of Publication 12.10.2022
Get full text
Year of Publication 12.10.2022
Patent
Organometallic adduct compounds and method of manufacturing integrated circuit device using the same
AOKI YUTARO, CHO YOUN JOUNG, KOIDE TAKANORI, KIM JAE WOON, UCHIUZOU HIROYUKI, PARK GYU HEE, RYU SEUNG MIN, SAITO KAZUYA, MANABE YOSHIKI, FUSE WAKANA
Year of Publication 28.09.2021
Get full text
Year of Publication 28.09.2021
Patent