Photo-induced atomic layer deposition of tantalum oxide thin films from Ta(OC2H5)5 and O2
LEE, Young-Hoon, KWAK, Jae-Chan, GANG, Bong-Suck, KIM, Hie-Chul, CHOI, Byung-Ho, JEONG, Bong-Kyo, PARK, Sung-Ho, LEE, Kyuoung-Ho
Published in Journal of the Electrochemical Society (2004)
Published in Journal of the Electrochemical Society (2004)
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Journal Article
Photo-Induced Atomic Layer Deposition of Tantalum Oxide Thin Films from Ta(OC[sub 2]H[sub 5])[sub 5] and O[sub 2]
Lee, Young-Hoon, Kwak, Jae-Chan, Gang, Bong-Suck, Kim, Hie-Chul, Choi, Byung-Ho, Jeong, Bong-Kyo, Park, Sung-Ho, Lee, Kyuoung-Ho
Published in Journal of the Electrochemical Society (2004)
Published in Journal of the Electrochemical Society (2004)
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Journal Article
A SHADOW MASK FOR COLOR BRAUN TUBE, AND A METHOD FOR MANUFACTURING THE SAME
KWON, SUK HWAN, CHOI, BYEONG HO, JEONG, BONG KYO, KIM, HYUNG SU, KIM, HIE CHUL, KIM, MIN WAN, JANG, JONG MIN
Year of Publication 15.11.2005
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Year of Publication 15.11.2005
Patent
ATOMIC THIN LAYER DEPOSITION APPARATUS AND METHOD
KWON, SUK HWAN, CHOI, BYEONG HO, KIM, HIE CHUL, KIM, MIN WAN, KIM, DAE YOUN, KANG, BONG SEOK, JANG, JONG MIN
Year of Publication 13.07.2005
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Year of Publication 13.07.2005
Patent