Low viscosity high resolution patterning material
BAILEY TODD, KIM EUI-KYOON, JOHNSON STEPHEN C, WILLSON CARLTON GRANT, WATTS MICHAEL P.C, STACEY NICHOLAS A
Year of Publication 25.12.2003
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Year of Publication 25.12.2003
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Plasma surface treatment to prevent pattern collapse in immersion lithography
KIM EUI KYOON, DAI HUIXIONG, NAIK MEHUL, SEAMONS MARTIN JAY, KIM BOK HOEN, PADHI DEENESH
Year of Publication 01.12.2010
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Year of Publication 01.12.2010
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Systems for plasma enhanced chemical vapor deposition and bevel edge etching
KIM EUI KYOON, NOWAK THOMAS, CHAN CHIU, AL-BAYATI AMIR, BALASUBRAMANIAN GANESH, SHAH ASHISH, ZHOU JIANHUA, DU BOIS DALE R, WERNER JOSEPH C, FODOR MARK A, JANAKIRAMAN KARTHIK, SIVARAMAKRISHNAN VISWESWAREN, AYOUB MOHAMAD
Year of Publication 18.09.2013
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Year of Publication 18.09.2013
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Plasma surface treatment to prevent pattern collapse in immersion lithography
SEAMONS, MARTIN JAY, PADHI, DEENESH, DAI, HUI-XIONG, KIM, EUI-KYOON, KIM, BOK HOEN, NAIK, MEHUL
Year of Publication 01.07.2009
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Year of Publication 01.07.2009
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Plasma surface treatment to prevent pattern collapse in immersion lithography
KIM EUI KYOON, DAI HUIXIONG, NAIK MEHUL, SEAMONS MARTIN JAY, KIM BOK HOEN, PADHI DEENESH
Year of Publication 13.05.2009
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Year of Publication 13.05.2009
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Apparatus and method for centering a substrate in a process chamber
KIM EUI KYOON, NOWAK THOMAS, CHAN CHIU, AL-BAYATI AMIR, BALASUBRAMANIAN GANESH, SHAH ASHISH, ZHOU JIANHUA, DU BOIS DALE R, WERNER JOSEPH C, FODOR MARK A, JANAKIRAMAN KARTHIK, SIVARAMAKRISHNAN VISWESWAREN, AYOUB MOHAMAD
Year of Publication 04.07.2012
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Year of Publication 04.07.2012
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Apparatus and method for processing a substrate edge region
KIM EUI KYOON, NOWAK THOMAS, CHAN CHIU, AL-BAYATI AMIR, BALASUBRAMANIAN GANESH, SHAH ASHISH, ZHOU JIANHUA, DU BOIS DALE R, WERNER JOSEPH C, FODOR MARK A, JANAKIRAMAN KARTHIK, SIVARAMAKRISHNAN VISWESWAREN, AYOUB MOHAMAD
Year of Publication 04.04.2012
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Year of Publication 04.04.2012
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Systems for plasma enhanced chemical vapor deposition and bevel edge etching
KIM EUI KYOON, NOWAK THOMAS, CHAN CHIU, AL-BAYATI AMIR, BALASUBRAMANIAN GANESH, SHAH ASHISH, ZHOU JIANHUA, DU BOIS DALE R, WERNER JOSEPH C, FODOR MARK A, JANAKIRAMAN KARTHIK, SIVARAMAKRISHNAN VISWESWAREN, AYOUB MOHAMAD
Year of Publication 16.06.2010
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Year of Publication 16.06.2010
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Apparatus and method for processing a substrate edge region
KIM EUI KYOON, NOWAK THOMAS, CHAN CHIU, AL-BAYATI AMIR, BALASUBRAMANIAN GANESH, SHAH ASHISH, ZHOU JIANHUA, DU BOIS DALE R, WERNER JOSEPH C, FODOR MARK A, JANAKIRAMAN KARTHIK, SIVARAMAKRISHNAN VISWESWAREN, AYOUB MOHAMAD
Year of Publication 31.03.2010
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Year of Publication 31.03.2010
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Systems for plasma enhanced chemical vapor deposition and bevel edge etching
BALASUBRAMANIAN, GANESH, SIVARAMAKRISHNAN, VISWESWAREN, SHAH, ASHISH, KIM, EUI-KYOON, AYOUB, MOHAMAD, FODOR, MARK A, DU BOIS, DALE R, CHAN, CHIU, NOWAK, THOMAS, JANAKIRAMAN, KARTHIK, WERNER, JOSEPH C, AL-BAYATI, AMIR, ZHOU, JIAN-HUA
Year of Publication 16.06.2009
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Year of Publication 16.06.2009
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Apparatus and method for processing a substrate edge region
BALASUBRAMANIAN, GANESH, SIVARAMAKRISHNAN, VISWESWAREN, SHAH, ASHISH, KIM, EUI-KYOON, AYOUB, MOHAMAD, FODOR, MARK A, DU BOIS, DALE R, CHAN, CHIU, NOWAK, THOMAS, JANAKIRAMAN, KARTHIK, WERNER, JOSEPH C, AL-BAYATI, AMIR, ZHOU, JIANHUA
Year of Publication 01.05.2009
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Year of Publication 01.05.2009
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