METHODS OF MAKING CERAMIC-BASED THERMALLY CONDUCTIVE POWER SUBSTRATES
KIM, Eui Kyoon, BRITTING, Stefan, YAO, Yiying, CHEN, Yajie, MEYER, Andreas, SCHMIDT, Karsten, WILLIAMS, Shawn P
Year of Publication 01.08.2019
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Year of Publication 01.08.2019
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Method of making a multi-layer magneto-dielectric material
KIM, EUI KYOON, WHITE, MICHAEL, SPRENTALL, KARL EDWARD, SETHUMADHAVAN, MURALI
Year of Publication 01.09.2018
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Year of Publication 01.09.2018
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Methods of making ceramic-based thermally conductive power substrates
CHEN, YAJIE, BRITTING, STEFAN, MEYER, ANDREAS, WILLIAMS, SHAWN P, SCHMIDT, KARSTEN, KIM, EUI KYOON, YAO, YI-YING
Year of Publication 01.09.2019
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Year of Publication 01.09.2019
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PLASMA SURFACE TREATMENT TO PREVENT PATTERN COLLAPSE IN IMMERSION LITHOGRAPHY
KIM EUI KYOON, DAI HUIXIONG, NAIK MEHUL, SEAMONS MARTIN JAY, KIM BOK HOEN, PADHI DEENESH
Year of Publication 12.05.2011
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Year of Publication 12.05.2011
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PLASMA SURFACE TREATMENT FOR PREVENTING PATTERN COLLAPSE IN LIQUID IMMERSION PHOTOLITHOGRAPHY
KIM EUI KYOON, DAI HUIXIONG, NAIK MEHUL B, SEAMONS MARTIN JAY, KIM BOK HOEN, PADHI DEENESH
Year of Publication 25.06.2009
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Year of Publication 25.06.2009
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PLASMA SURFACE TREATMENT TO PREVENT PATTERN COLLAPSE IN IMMERSION LITHOGRAPHY
DAI HUIXIONG, NAIK MEHUL B, SEAMONS MARTIN JAY, KIM, EUI KYOON, KIM BOK HOEN, PADHI DEENESH
Year of Publication 11.06.2009
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Year of Publication 11.06.2009
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PLASMA SURFACE TREATMENT TO PREVENT PATTERN COLLAPSE IN IMMERSION LITHOGRAPHY
KIM EUI KYOON, DAI HUIXIONG, NAIK MEHUL, SEAMONS MARTIN JAY, KIM BOK HOEN, PADHI DEENESH
Year of Publication 23.04.2009
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Year of Publication 23.04.2009
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SYSTEMS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AND BEVEL EDGE ETCHING
KIM EUI KYOON, NOWAK THOMAS, DUBOIS DALE R, CHAN CHIU, AL-BAYATI AMIR, BALASUBRAMANIAN GANESH, SHAH ASHISH, ZHOU JIANHUA, WERNER JOSEPH C, FODOR MARK A, JANAKIRAMAN KARTHIK, SIVARAMAKRISHNAN VISWESWAREN, AYOUB MOHAMAD
Year of Publication 23.08.2012
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Year of Publication 23.08.2012
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Systems for plasma enhanced chemical vapor deposition and bevel edge etching
KIM EUI KYOON, NOWAK THOMAS, DUBOIS DALE R, CHAN CHIU, AL-BAYATI AMIR, BALASUBRAMANIAN GANESH, SHAH ASHISH, ZHOU JIANHUA, WERNER JOSEPH C, FODOR MARK A, JANAKIRAMAN KARTHIK, SIVARAMAKRISHNAN VISWESWAREN, AYOUB MOHAMAD
Year of Publication 12.06.2012
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Year of Publication 12.06.2012
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Systems for plasma enhanced chemical vapor deposition and bevel edge etching
Shah, Ashish, DuBois, Dale R, Balasubramanian, Ganesh, Fodor, Mark A, Kim, Eui Kyoon, Chan, Chiu, Janakiraman, Karthik, Nowak, Thomas, Werner, Joseph C, Sivaramakrishnan, Visweswaren, Ayoub, Mohamad, Al-Bayati, Amir, Zhou, Jianhua
Year of Publication 12.06.2012
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Year of Publication 12.06.2012
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Low viscosity high resolution patterning material
Watts, Michael, Willson, Carlton, Bailey, Todd, Johnson, Stephen, Kim, Eui-Kyoon, Stacey, Nicholas
Year of Publication 25.12.2003
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Year of Publication 25.12.2003
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APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE EDGE REGION
KIM EUI KYOON, NOWAK THOMAS, CHAN CHIU, AL-BAYATI AMIR, BALASUBRAMANIAN GANESH, SHAH ASHISH, ZHOU JIANHUA, DU BOIS DALE R, WERNER JOSEPH C, FODOR MARK A, JANAKIRAMAN KARTHIK, SIVARAMAKRISHNAN VISWESWAREN, AYOUB MOHAMAD
Year of Publication 15.01.2009
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Year of Publication 15.01.2009
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SYSTEMS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AND BEVEL EDGE ETCHING
BALASUBRAMANIAN, GANESH, SIVARAMAKRISHNAN, VISWESWAREN, SHAH, ASHISH, AYOUB, MOHAMAD, WERNER, JOSEPH, C, FODOR, MARK, A, CHAN, CHIU, NOWAK, THOMAS, KIM, EUI, KYOON, DU BOIS, DALE, R, JANAKIRAMAN, KARTHIK, AL-BAYATI, AMIR, ZHOU, JIANHUA
Year of Publication 15.01.2009
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Year of Publication 15.01.2009
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APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE EDGE REGION
BALASUBRAMANIAN, GANESH, SIVARAMAKRISHNAN, VISWESWAREN, SHAH, ASHISH, AYOUB, MOHAMAD, FODOR, MARK A, DU BOIS, DALE R, CHAN, CHIU, NOWAK, THOMAS, JANAKIRAMAN, KARTHIK, WERNER, JOSEPH C, KIM, EUI KYOON, AL-BAYATI, AMIR, ZHOU, JIANHUA
Year of Publication 15.01.2009
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Year of Publication 15.01.2009
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SYSTEMS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AND BEVEL EDGE ETCHING
KIM EUI KYOON, NOWAK THOMAS, DUBOIS DALE R, CHAN CHIU, AL-BAYATI AMIR, BALASUBRAMANIAN GANESH, SHAH ASHISH, ZHOU JIANHUA, WERNER JOSEPH C, FODOR MARK A, JANAKIRAMAN KARTHIK, SIVARAMAKRISHNAN VISWESWAREN, AYOUB MOHAMAD
Year of Publication 15.01.2009
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Year of Publication 15.01.2009
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