Search Results - "KIM, Sunghyup" :: K.UTB vyhledávací portál

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Polishing pad and method of processing wafer using the same

by KIM SEOK RYUL, KIM SUNGHYUP, LEE SANGHOON
Year of Publication 05.07.2019

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PLASMA TREATMENT APPARATUS MONITORING METHOD OF SEMICONDUCTOR DEVICE MANUFACTURING PROCESS USING THE SAME AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE INCLUDING THE MONITORING METHOD

by KIM SUNGHYUP, LIM MEEHYUN, YOO HOSUN, YONG HYUNG JUNG, KIM SUNG YEOL
Year of Publication 16.06.2022

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PIPE BLOCKAGE PREDICTION METHODS

by KIM, Sunghyup, CHOUNG, Hanahchim, KIM, Seokryul
Year of Publication 22.02.2024

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SOURCE VESSEL FOR EUV

by Yoon, Daegeun, Kim, Sunghyup, Hong, Seungpyo, Lee, Injae
Year of Publication 27.06.2024

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Pellicle for reflective mask

by Kim, Sunghyup, Lee, Jinhwan, Kim, Jeonggil
Year of Publication 27.09.2022

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EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

by LEE, Injae, NAM, Yebin, KIM, Sunghyup, YOON, Daegeun
Year of Publication 11.04.2024

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Target debris collection device and extreme ultraviolet light source apparatus including the same

by Kim, Sunghyup, Yu, Ho, Kim, Jeonggil, Choi, Minseok
Year of Publication 26.12.2023

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Chip bonding apparatus and method of manufacturing semiconductor device using the apparatus

by Kim, Sunghyup, Lim, Kyeongbin, Lee, Joongha, Park, Sangha, Kim, Junhyung
Year of Publication 05.12.2023

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Collector mirror and apparatus for creating extreme ultraviolet light including the same

by Kim, Sunghyup, Song, Hoseok, Kim, Jeonggil, Lee, Injae
Year of Publication 11.07.2023

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WAFER CHUCK TABLE AND WAFER CHUCK SYSTEM

by KIM, Hyeonjin, KIM, Sunghyup, LEE, Jonggu, KIM, Jeongdu, KIM, Junghwan
Year of Publication 29.06.2023

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APPARATUS AND METHOD FOR CONTROLLING CHUCKING FORCE

by HAN, Dongkyeng, KIM, Hyeonjin, KIM, Sunghyup, KIM, Jeongdu, LEE, Jonggu
Year of Publication 22.06.2023

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TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME

by KIM, Jeonggil, KIM, Sunghyup, CHOI, Minseok, YU, Ho
Year of Publication 15.06.2023

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Semiconductor chip bonding apparatus including head having thermally conductive materials

by Kim, Sunghyup, Choi, Sebin, Lee, Jonggu, Lee, Sukwon
Year of Publication 21.03.2023

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COLLECTOR MIRROR AND APPARATUS FOR CREATING EXTREME ULTRAVIOLET LIGHT INCLUDING THE SAME

by SONG, Hoseok, LEE, Injae, KIM, Jeonggil, KIM, Sunghyup
Year of Publication 09.03.2023

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COLLECTOR MIRROR AND APPARATUS FOR CREATING EXTREME ULTRAVIOLET LIGHT INCLUDING THE SAME

by SONG, Hoseok, LEE, Injae, KIM, Jeonggil, KIM, Sunghyup
Year of Publication 08.03.2023

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Target debris collection device and extreme ultraviolet light source apparatus including the same

by Kim, Sunghyup, Yu, Ho, Kim, Jeonggil, Choi, Minseok
Year of Publication 07.03.2023

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PELLICLE FOR REFLECTIVE MASK

by LEE, Jinhwan, KIM, Jeonggil, KIM, Sunghyup
Year of Publication 22.04.2021

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SOURCE GAS NOZZLE AND SEMICONDUCTOR WAFER PROCESSING APPARATUS INCLUDING THE SAME

by Kim, Sunghyup, Choi, Sebin, Hwang, Byeongho, Lee, Sang Yup, Park, Jiye, Ahn, Taeheung
Year of Publication 15.08.2024

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Extreme ultraviolet light source system

by Kim, Sunghyup, Nam, Yebin, Gil, Myeongjun, Lee, Injae
Year of Publication 16.08.2022

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PLASMA TREATMENT APPARATUS, A METHOD OF MONITORING A PROCESS OF MANUFACTURING A SEMICONDUCTOR DEVICE BY USING THE SAME, AND A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING THE MONITORING METHOD

by YONG, HYUNG-JUNG, KIM, SUNG-YEOL, KIM, SUNGHYUP, LIM, MEEHYUN
Year of Publication 09.06.2022

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