Polishing simulation method and polishing simulation system
KIM SEOK RYUL, CHOI SE BIN, KIM SUNG HYUP, SON JAE HYEON, WI JAE YOUN
Year of Publication 17.07.2024
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Year of Publication 17.07.2024
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SOURCE GAS NOZZLE AND SEMICONDUCTOR WAFER PROCESSING APPARATUS INCLUDING THE SAME
CHOI SE BIN, KIM SUNG HYUP, LEE SANG YUB, AHN TAE HEUNG, HWANG BYEONG HO, PARK JI YE
Year of Publication 19.08.2024
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Year of Publication 19.08.2024
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WAFER CHUCK TABLE AND WAFER CHUCK SYSTEM
KIM JEONG DU, LEE JONG GU, KIM SUNG HYUP, KIM JUNG HWAN, KIM HYEON JIN
Year of Publication 06.07.2023
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Year of Publication 06.07.2023
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APPARATUS AND METHOD FOR CONTROLLING CHUCKING FORCE
KIM JEONG DU, LEE JONG GU, KIM SUNG HYUP, HAN DONG KYENG, KIM HYEON JIN
Year of Publication 27.06.2023
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Year of Publication 27.06.2023
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Apparatus for heating wafer
KIM JEONG DU, KIM SUNG HYUP, HWANG JUNG HWAN, CHOI GEON SOO, PARK JUN HYOUN, JIN DA HEE
Year of Publication 05.03.2024
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Year of Publication 05.03.2024
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Deposition apparatus
KIM KEON WOO, KIM SUNG HYUP, CHOI JUN YOUNG, CHEONG SANG HOON, HWANG BYOUNG CHEOL, LEE SANG WOOK
Year of Publication 03.02.2023
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Year of Publication 03.02.2023
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Apparatus for processing substrate
KIM JEONG DU, LEE JONG GU, KIM SUNG HYUP, LEE YUN JAE, KIM HYEON JIN, ANN SUNG JUN
Year of Publication 07.06.2023
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Year of Publication 07.06.2023
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