METHOD OF FORMING A HARDMASK MATERIAL LAYER
KIM, HYUN WOO, YU, NAE RY, KIM, MIN SOO, YI, SONG SE, SONG, HYUN JI, LEE, WON KI, BAEK, JAE YEOL, KIM, MYEONG KOO
Year of Publication 09.08.2016
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Year of Publication 09.08.2016
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METHOD OF PRODUCIMG LAYER STRUCTURE LAYER STRUCTURE AND METHOD OF FORMING PATTERNS
KANG, SUN HAE, NAM, YOUN HEE, YOON, BYE RI, JEONG, SEUL GI, HONG, SEUNG HEE, YU, NAE RY, KIM, HEA JUNG, KIM, MIN SOO, KIM, YOUNG MIN, YI, SONG SE, BAEK, JAE YEOL, KIM, SUNG HWAN, HWANG, SUN MIN, JO, YEON HEE, KIM, SUNG MIN, LEE, CHUNG HEON, KIM, YUN JUN, SONG, HYUN JI, HWANG, WON JONG, YOON, YONG WOON, KIM, MYEONG KOO
Year of Publication 18.08.2017
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Year of Publication 18.08.2017
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METHOD OF PRODUCIMG LAYER STRUCTURE, LAYER STRUCTURE, AND METHOD OF FORMING PATTERNS
KANG, SUN HAE, NAM, YOUN HEE, YOON, BYE RI, JEONG, SEUL GI, HONG, SEUNG HEE, YU, NAE RY, KIM, HEA JUNG, KIM, MIN SOO, KIM, YOUNG MIN, YI, SONG SE, BAEK, JAE YEOL, KIM, SUNG HWAN, HWANG, SUN MIN, JO, YEON HEE, KIM, SUNG MIN, LEE, CHUNG HEON, KIM, YUN JUN, SONG, HYUN JI, HWANG, WON JONG, YOON, YONG WOON, KIM, MYEONG KOO
Year of Publication 11.05.2016
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Year of Publication 11.05.2016
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Methods of forming hardmask material film
Kim Min-soo, Lee Won-ki, Yi Song-se, Baek Jae-yeol, Song Hyun-ji, Yu Nae-ry, Kim Myeong-koo, Kim Hyun-woo
Year of Publication 23.01.2018
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Year of Publication 23.01.2018
Patent
METHODS OF FORMING HARDMASK MATERIAL FILM
KIM Myeong-koo, YU Nae-ry, KIM Hyun-woo, SONG Hyun-ji, LEE Won-ki, YI Song-se, BAEK Jae-yeol, KIM Min-soo
Year of Publication 04.08.2016
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Year of Publication 04.08.2016
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HARDCOATING COMPOSITION
YOON, JONG KUK, CHOI, SOO MI, KIM, SEONG RYUL, LEE, JOUNG BUM, KIM, MYEONG KOO
Year of Publication 07.05.2009
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Year of Publication 07.05.2009
Patent
PHOTOSETTING LOW-REFRACTIVE COATING COMPOSITION AND ANTI-REFLECTION FILM THEREOF
YOON, JONG KUK, KIM, SEONG RYUL, CHOI, SOO MI, LEE, JOUNG BUM, KIM, MYEONG KOO
Year of Publication 29.04.2009
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Year of Publication 29.04.2009
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Layer structure and method of producing the same, method of forming patterns, and semiconductor device
KIM, YOUNG-MIN, KIM, MIN-SOO, KANG, SUN-HAE, NAM, YOUN-HEE, KIM, SUNG-HWAN, YU, NAE-RY, JENONG, SEUL-GI, YI, SONG-SE, LEE, CHUNG-HEON, JO, YEON-HEE, HWANG, SUN-MIN, KIM, SUNG-MIN, YOON, YONG-WOON, SONG, HYUN-JI, KIM, YUN-JUN, BAEK, JAE-YEOL, KIM, HEA-JUNG, HONG, SEUNG-HEE, KIM, MYEONG-KOO, YOON, BYE-RI, HWANG, WON-JONG
Year of Publication 01.08.2016
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Year of Publication 01.08.2016
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