Metrology Requirements for the 32 nm Technology Node and Beyond
Allgair, John, Bunday, Benjamin, Cordes, Aaron, Lipscomb, Pete, Godwin, Milt, Vartanian, Victor, Bishop, Michael, Arazi, Doron, Kim, Kye-Weon
Published in ECS transactions (06.03.2009)
Published in ECS transactions (06.03.2009)
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Journal Article
In-line metrology for the 45 nm and 32 nm nodes
Allgair, John, Bunday, Benjamin, Cordes, Aaron, Lipscomb, Pete, Godwin, Milt, Vartanian, Victor, Bishop, Michael, Arazi, Doron, Kye-Weon Kim
Published in 2008 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2008)
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Published in 2008 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2008)
Conference Proceeding
Development of the inspection system of defects on a CMP (Chemical Mechanical Polishing) pad
Kye Weon Kim, Yu Sin Yang, Chung Sam Chun, Sang Mun Chun, Dong Chun Lee, Sun Yong Choi, Sang Bong Choi, Sung Jin Park
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
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Conference Proceeding
Development of automated contact inspection system using in-line CD SEM
Sang-Mun Chon, Sang-Bong Choi, Yong-Wan Kim, Kye-Weon Kim, Kyu-Hong Lim, Sun-Yong Choi, Chung-Sam Jun
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
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Conference Proceeding
Yield Goals for 22 nm
Patel, Dilip, Kim, Kye-Weon, Arazi, Doron, Allgair, John, Bunday, Benjamin, Godwin, Milton, Vartanian, Victor, Lipscomb, Pete, Cordes, Aaron
Published in Semiconductor International (01.06.2008)
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Published in Semiconductor International (01.06.2008)
Trade Publication Article
APPARATUS AND METHOD FOR CHANGING LAMP IN SEMICONDUCTOR FABRICATING EQUIPMENT
KIM, KYE WEON, KIM, MOON KYUNG, LEE, BYUNG BEOM, SONG, WON KWAN, LEE, JIN SUN
Year of Publication 27.02.2008
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Year of Publication 27.02.2008
Patent
TEST PATTERN AND METHOD FOR MEASURING SILICON ETCHING DEPTH
PARK JANG-IK, JUN CHUNG-SAM, PARK HWAN-SHIK, KIM KYE-WEON, SONG WON-KWAN, KIM SUNG-GON
Year of Publication 09.08.2007
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Year of Publication 09.08.2007
Patent
TEST PATTERN AND METHOD FOR MEASURING SILICON ETCHING DEPTH
JUN, CHUNG SAM, KIM, KYE WEON, KIM, SUNG GON, PARK, HWAN SHIK, SONG, WON KWAN, PARK, JANG IK
Year of Publication 12.04.2007
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Year of Publication 12.04.2007
Patent