APPARATUS AND METHOD FOR REPAIRING A MASK
PARK, JIN CHUL, YEOM, JONG SUP, LEE, JAE YONG, JO, JANG HO, KIM, KI WAN, HONG, SOK YONG, LEE, KEUN HAENG, YANG, HEE CHANG, KIM, HYUN JUNG, YANG, JEONG BOK, KIM, JUN RAE, CHO, SUNG HWAN, SHIN, GYU SUNG, PARK, NOH HEON
Year of Publication 05.04.2010
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Year of Publication 05.04.2010
Patent
Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
Choi, Jong-Sik, Yang, Bong Seob, Won, Seok-Jun, Kim, Jun Rae, Suh, Sungin, Park, Hui Kyung, Heo, Jaeyeong, Kim, Hyeong Joon
Published in ECS solid state letters (01.01.2013)
Published in ECS solid state letters (01.01.2013)
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Journal Article