Search Results - "KIM, JA YUL" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND METHOD FOR TRANSPORTING REPLACEABLE COMPONENTS IN THE SEMICONDUCTOR MANUFACTURING EQUIPMENT

SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND METHOD FOR TRANSPORTING REPLACEABLE COMPONENTS IN THE SEMICONDUCTOR MANUFACTURING EQUIPMENT

by HWANG, Beom Soo, LEE, Kong Woo, KIM, Ja-Yul, LEE, Kyu Sang, JEON, Hyun Joo, CHO, Nam Young, CHOI, Jin Hyuk, SONG, Myung Ki
Year of Publication 11.04.2024

Get full text

Patent

CONTROL METHOD OF EXPOSURE APPARATUS AND CONTROL APPARATUS OF EXPOSURE APPARATUS

CONTROL METHOD OF EXPOSURE APPARATUS AND CONTROL APPARATUS OF EXPOSURE APPARATUS

by AHN, Sung-Min, KIM, Ja-Yul, PARK, Sang-Hyun, PARK, Sang-Ha, YEH, Sang-Su
Year of Publication 18.04.2019

Get full text

Patent

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

by Jang Sang Don, Son Tae Kyu, Kim Ja Yul
Year of Publication 29.11.2016

Get full text

Patent

Semiconductor manufacturing equipment

Semiconductor manufacturing equipment

by CHO, NAM-YOUNG, LEE, KONG-WOO, HWANG, BEOM-SOO, SONG, MYUNG-KI, CHOI, JIN-HYUK, JEON, HYUN-JOO, KIM, JA-YUL, LEE, KYU-SANG
Year of Publication 16.04.2024

Get full text

Patent

APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF

APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF

by SON TAE KYU, JANG SANG DON, KIM JA YUL
Year of Publication 02.06.2016

Get full text

Patent

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

by SON TAE KYU, JANG SANG DON, KIM JA YUL
Year of Publication 15.03.2016

Get full text

Patent

Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof

Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof

by SON TAE KYU, JANG SANG DON, KIM JA YUL
Year of Publication 30.06.2015

Get full text

Patent

ULTRA-PRECISION POSITION CONTROL DEVICE AND METHOD FOR DETERMINING POSITION AND ATTITUDE INFORMATION ASSOCIATED WITH A 6-DEGREE-OF-FREEDOM STAGE THEREOF

ULTRA-PRECISION POSITION CONTROL DEVICE AND METHOD FOR DETERMINING POSITION AND ATTITUDE INFORMATION ASSOCIATED WITH A 6-DEGREE-OF-FREEDOM STAGE THEREOF

by SON TAE KYU, JANG SANG DON, KIM JA YUL
Year of Publication 22.08.2013

Get full text

Patent

APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF

APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF

by SON TAE KYU, JANG SANG DON, KIM JA YUL
Year of Publication 03.01.2013

Get full text

Patent

Semiconductor manufacturing equipment and expandable component transporting method thereof

Semiconductor manufacturing equipment and expandable component transporting method thereof

by CHOI JIN HYUK, LEE KYU SANG, HWANG BEOM SOO, JEON HYUN JOO, LEE KONG WOO, CHO NAM YOUNG, KIM JA YUL, SONG MYUNG KI
Year of Publication 16.04.2024

Get full text

Patent

METHOD OF CONTROLLING AN EXPOSURE DEVICE AND APPARATUS FOR CONTROLLING AN EXPOSURE DEVICE

METHOD OF CONTROLLING AN EXPOSURE DEVICE AND APPARATUS FOR CONTROLLING AN EXPOSURE DEVICE

by AHN SUNG MIN, YEH SANG SU, PARK SANG HA, KIM JA YUL, PARK SANG HYUN
Year of Publication 26.04.2019

Get full text

Patent

MICORSCOPY DEVICE

MICORSCOPY DEVICE

by GWEON, DAE GAB, JEONG, HYEONG JUN, LEE, DONG RYOUNG, RYE, JI HEUN, KIM, JA YUL
Year of Publication 11.05.2017

Get full text

Patent

CONFOCAL MICORSCOPY SYSTEM

CONFOCAL MICORSCOPY SYSTEM

by GWEON, DAE GAB, JEONG, HYEONG JUN, RYE, JI HEUN, KIM, JA YUL
Year of Publication 10.05.2017

Get full text

Patent

MASKLESS EXPOSURE APPARATUS AND METHOD FOR STITCHING EXPOSURE USING THE SAME

MASKLESS EXPOSURE APPARATUS AND METHOD FOR STITCHING EXPOSURE USING THE SAME

by JANG, SANG DON, KIM, JA YUL
Year of Publication 12.09.2012

Get full text

Patent

METHOD FOR CALCULATING POSITION AND ORIENTATION DATA OF 6 DEGREES OF FREEDOM STAGE

METHOD FOR CALCULATING POSITION AND ORIENTATION DATA OF 6 DEGREES OF FREEDOM STAGE

by JANG, SANG DON, SON, TAE KYU, KIM, JA YUL
Year of Publication 26.02.2013

Get full text

Patent

APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF

APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF

by JANG, SANG DON, SON, TAE KYU, KIM, JA YUL
Year of Publication 18.01.2013

Get full text

Patent

MASKLESS EXPOSURE APPARATUS AND METHOD FOR COMPENSATING CUMULATIVE INTENSITY OF ILLUMINATION USING THE SAME

MASKLESS EXPOSURE APPARATUS AND METHOD FOR COMPENSATING CUMULATIVE INTENSITY OF ILLUMINATION USING THE SAME

by JANG, SANG DON, SON, TAE KYU, KIM, JA YUL, LEE, SANG MIN
Year of Publication 12.09.2012

Get full text

Patent

BAR MIRROR DEVICE

BAR MIRROR DEVICE

by PARK, SANG WOOK, KIM, KI HYUN, HONG, SANG JOON, JANG, SANG DON, KIM, JA YUL
Year of Publication 14.12.2011

Get full text

Patent