Investigation of oxide layer removal mechanism using reactive gases
Kim, Hyun-Tae, Lim, Jung-Soo, Kim, Min-Su, Oh, Hoon-Jung, Ko, Dae-Hong, Kim, Gyoo-Dong, Shin, Woo-Gon, Park, Jin-Goo
Published in Microelectronic engineering (05.03.2015)
Published in Microelectronic engineering (05.03.2015)
Get full text
Journal Article
PLASMA APPARATUS FOR VAPOR PHASE ETCHING AND CLEANING
NA, JUNG GYUN, KIM, HO SIK, LIM, HONG JU, KIM, GYOO DONG, SHIN, WOO GON
Year of Publication 02.02.2016
Get full text
Year of Publication 02.02.2016
Patent
MULTI CAPACITIVELY COUPLED PLASMA PROCESSING APPARTUS AND METHOD THEREOF
HUH, NO HYUN, PARK, SUNG MIN, NAM, CHANG WOO, KIM, GYOO DONG, CHOI, DAI KYU
Year of Publication 31.08.2011
Get full text
Year of Publication 31.08.2011
Patent
MULTI CAPACITIVELY COUPLED ELECTRODE ASSEMBLY AND PROCESSING APPARTUS THE SAME
HUH, NO HYUN, PARK, SUNG MIN, NAM, CHANG WOO, KIM, GYOO DONG, CHOI, DAI KYU
Year of Publication 31.08.2011
Get full text
Year of Publication 31.08.2011
Patent
MULTI INDUCTIVELY COUPLED PLASMA REACTOR AND METHOD THEREOF
HUH, NO HYUN, PARK, SUNG MIN, NAM, CHANG WOO, KIM, GYOO DONG, CHOI, DAI KYU
Year of Publication 30.08.2011
Get full text
Year of Publication 30.08.2011
Patent
APPARATUS FOR MULTI SUPPLYING GAS AND PLASMA REACTOR WITH APPARATUS FOR MULTI SUPPLYING GAS
HUH, NO HYUN, PARK, SUNG MIN, NAM, CHANG WOO, KIM, GYOO DONG, CHOI, DAI KYU
Year of Publication 30.08.2011
Get full text
Year of Publication 30.08.2011
Patent
Multi Inductively Coupled Plasma Reactor and Method Thereof
NAM, CHANG-WOO, PARK, SUNG-MIN, CHOI, DAE-KYU, HUH, NO-HYUN, KIM, GYOO-DONG
Year of Publication 01.07.2015
Get full text
Year of Publication 01.07.2015
Patent
Multi inductively coupled plasma reactor and method thereof
KIM GYOO-DONG, NAM CHANG-WOO, PARK SUNG-MIN, CHOI DAE-KYU, HUH NO-HYUN
Year of Publication 13.05.2015
Get full text
Year of Publication 13.05.2015
Patent