Search Results - "KILPINEN, Petteri" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

PLUG FOR MEMS CAVITY

PLUG FOR MEMS CAVITY

by KILPINEN, Petteri
Year of Publication 16.11.2023

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Patent

METHOD FOR ETCHING GAPS OF UNEQUAL WIDTH

METHOD FOR ETCHING GAPS OF UNEQUAL WIDTH

by KILPINEN, Petteri
Year of Publication 27.10.2022

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Patent

MEMS ROTOR WITH COATED BOTTOM SURFACE

MEMS ROTOR WITH COATED BOTTOM SURFACE

by KILPINEN, Petteri
Year of Publication 27.10.2022

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Patent

MEMS ROTOR WITH COATED BOTTOM SURFACE

MEMS ROTOR WITH COATED BOTTOM SURFACE

by Kilpinen, Petteri
Year of Publication 26.10.2022

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Patent

METHOD FOR ETCHING GAPS OF UNEQUAL WIDTH

METHOD FOR ETCHING GAPS OF UNEQUAL WIDTH

by Kilpinen, Petteri
Year of Publication 26.10.2022

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Patent

METHOD FOR BONDING A MICROELECTROMECHANICAL DEVICE

METHOD FOR BONDING A MICROELECTROMECHANICAL DEVICE

by Kilpinen, Petteri, Partanen, Mikko
Year of Publication 29.05.2024

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Patent

METHOD FOR BONDING A MICROELECTROMECHANICAL DEVICE

METHOD FOR BONDING A MICROELECTROMECHANICAL DEVICE

by KILPINEN, Petteri, PARTANEN, Mikko
Year of Publication 23.05.2024

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Patent

STÖPSEL FÜR MEMS-HOHLRAUM

STÖPSEL FÜR MEMS-HOHLRAUM

by Kilpinen, Petteri
Year of Publication 16.11.2023

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Patent

ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS

ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS

by TORKKELI, Altti, KILPINEN, Petteri, LIUKKU, Matti
Year of Publication 28.09.2023

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Patent

IMPROVED ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS

IMPROVED ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS

by TORKKELI, Altti, KILPINEN, Petteri, LIUKKU, Matti
Year of Publication 27.09.2023

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Patent

DOUBLE LAYER MEMS DEVICES

DOUBLE LAYER MEMS DEVICES

by TORKKELI, Altti, OKAWA, Tadayuki, FUKUMITSU, Masakazu, BLOMQVIST, Anssi, KILPINEN, Petteri, LIUKKU, Matti, RYTKÖNEN, Ville-Pekka
Year of Publication 29.08.2024

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Patent

DOUBLE LAYER MEMS DEVICES

DOUBLE LAYER MEMS DEVICES

by MATTI, Liukku, TORKKELI, Altti, OKAWA, Tadayuki, FUKUMITSU, Mazakasu, BLOMQVIST, Anssi, KILPINEN, Petteri, RYTKÖNEN, Ville-Pekka
Year of Publication 28.08.2024

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Patent