Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films
AARIK, J, AIDLA, A, KIISLER, A.-A, UUSTARE, T, SAMMELSELG, V
Published in Thin solid films (26.02.1999)
Published in Thin solid films (26.02.1999)
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Journal Article
Atomic Layer Deposition of Tantalum Oxide Thin Films from Iodide Precursor
Kukli, Kaupo, Aarik, Jaan, Aidla, Aleks, Forsgren, Katarina, Sundqvist, Jonas, Hårsta, Anders, Uustare, Teet, Mändar, Hugo, Kiisler, Alma-Asta
Published in Chemistry of materials (01.01.2001)
Published in Chemistry of materials (01.01.2001)
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Journal Article
Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition
Aarik, Jaan, Aidla, Aleks, Kiisler, Alma-Asta, Uustare, Teet, Sammelselg, Väino
Published in Thin solid films (01.08.1997)
Published in Thin solid films (01.08.1997)
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Journal Article
Influence of substrate temperature on atomic layer growth and properties of HfO sub(2) thin films
Aarik, J, Aidla, A, Kiisler, A-A, Uustare, T, Sammelselg, V
Published in Thin solid films (01.01.1999)
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Published in Thin solid films (01.01.1999)
Journal Article