Inspecting system for particle-optical imaging of an object that can be arranged in a plane, deflection device for charged particles and method for operating the same
MULLER HEIKO DR, UHLEMANN STEPHAN DR, STEIGERWALD MICHAEL DR, KIENZLE OLIVER DR, STENKAMP DIRK DR, HAIDER MAX DR, KNIPPELMEYER RAINER DR
Year of Publication 12.02.2003
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Year of Publication 12.02.2003
Patent