EUV 방사선을 생성하기 위한 타겟 재료, 고휘도 EUV 소스 및 방법
ELLWI SAMIR, KOSHELEV KONSTANTIN NIKOLAEVICH, VINOKHODOV ALEKSANDR YURIEVICH, IVANOV VLADIMIR VITALIEVICH, KHRISTOFOROV OLEG BORISOVICH, MEDVEDEV VYACHESLAV VALERIEVICH, KRIVTSUN VLADIMIR MIKHAILOVICH, GLUSHKOV DENIS ALEKSANDROVICH, KRIVOKORYTOV MIKHAIL SERGEYEVICH, ASTAKHOV DMITRII IGOREVICH, LASH ALEKSANDR ANDREEVICH
Year of Publication 05.08.2024
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Year of Publication 05.08.2024
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고휘도 레이저 생성 플라즈마 소스 및 방사선 생성 및 수집 방법
ELLWI SAMIR, KOSHELEV KONSTANTIN NIKOLAEVICH, VINOKHODOV ALEKSANDR YURIEVICH, IVANOV VLADIMIR VITALIEVICH, KHRISTOFOROV OLEG BORISOVICH, MEDVEDEV VYACHESLAV VALERIEVICH, KRIVTSUN VLADIMIR MIKHAILOVICH, GLUSHKOV DENIS ALEKSANDROVICH, KRIVOKORYTOV MIKHAIL SERGEYEVICH, LASH ALEKSANDR ANDREEVICH
Year of Publication 19.06.2024
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Year of Publication 19.06.2024
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다중 섹션 컬렉터 모듈을 구비한 단파장 방사선 소스
ELLWI SAMIR, KOSHELEV KONSTANTIN NIKOLAEVICH, VINOKHODOV ALEKSANDR YURIEVICH, IVANOV VLADIMIR VITALIEVICH, MEDVEDEV VYACHESLAV VALERIEVICH, KHRISTOFOROV OLEG BORISOVICH, KRIVTSUN VLADIMIR MIKHAILOVICH, GLUSHKOV DENIS ALEKSANDROVICH, KRIVOKORYTOV MIKHAIL SERGEYEVICH, SIDELNIKOV YURY VIKTOROVICH, YAKUSHEV OLEG FELIKSOVICH, LASH ALEKSANDR ANDREEVICH
Year of Publication 11.07.2023
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Year of Publication 11.07.2023
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고휘도 레이저로 생성된 플라즈마 광원
ELLWI SAMIR, KOSHELEV KONSTANTIN NIKOLAEVICH, VINOKHODOV ALEKSANDR YURIEVICH, IVANOV VLADIMIR VITALIEVICH, MEDVEDEV VYACHESLAV VALERIEVICH, KHRISTOFOROV OLEG BORISOVICH, GLUSHKOV DENIS ALEXANDROVICH, KRIVTSUN VLADIMIR MIKHAILOVICH, KRIVOKORYTOV MIKHAIL SERGEYEVICH, SIDELNIKOV YURY VIKTOROVICH, YAKUSHEV OLEG FELIKSOVICH, LASH ALEKSANDR ANDREEVICH
Year of Publication 15.12.2021
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Year of Publication 15.12.2021
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회전하는 액체 금속 타겟을 가지는 X레이 소스 및 복사 생성 방법
ELLWI SAMIR, KOSHELEV KONSTANTIN NIKOLAEVICH, VINOKHODOV ALEKSANDR YURIEVICH, IVANOV VLADIMIR VITALIEVICH, MEDVEDEV VYACHESLAV VALERIEVICH, GLUSHKOV DENIS ALEXANDROVICH, KHRISTOFOROV OLEG BORISOVICH, KRIVTSUN VLADIMIR MIKHAILOVICH, KRIVOKORYTOV MIKHAIL SERGEYEVICH, SIDELNIKOV YURY VIKTOROVICH, YAKUSHEV OLEG FELIKSOVICH, LASH ALEKSANDR ANDREEVICH
Year of Publication 15.12.2021
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Year of Publication 15.12.2021
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HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATING AND COLLECTING RADIATION
GLUSHKOV, Denis Aleksandrovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 11.09.2024
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Year of Publication 11.09.2024
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SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE
GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 28.08.2024
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Year of Publication 28.08.2024
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High-brightness laser produced plasma source and method of generation and collection radiation
Khristoforov, Oleg Borisovich, Glushkov, Denis Aleksandrovich, Koshelev, Konstantin Nikolaevich, Ellwi, Samir, Ivanov, Vladimir Vitalievich, Medvedev, Vyacheslav Valerievich, Vinokhodov, Aleksandr Yurievich, Krivtsun, Vladimir Mikhailovich, Krivokorytov, Mikhail Sergeyevich, Lash, Aleksandr Andreevich
Year of Publication 02.07.2024
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Year of Publication 02.07.2024
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HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND METHOD OF COOLING THEREOF
SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir
Year of Publication 11.04.2024
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Year of Publication 11.04.2024
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X-ray source with rotating liquid-metal target
Khristoforov, Oleg Borisovich, Koshelev, Konstantin Nikolaevich, Ellwi, Samir, Vinokhodov, Aleksandr Yurievich, Ivanov, Vladimir Vitalievich, Medvedev, Vyacheslav Valerievich, Sidelnikov, Yury Viktorovich, Glushkov, Denis Alexandrovich, Krivtsun, Vladimir Mikhailovich, Yakushev, Oleg Feliksovich, Krivokorytov, Mikhail Sergeyevich, Lash, Aleksandr Andreevich
Year of Publication 09.01.2024
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Year of Publication 09.01.2024
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X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET
SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir
Year of Publication 22.11.2023
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Year of Publication 22.11.2023
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TARGET MATERIAL, HIGH-BRIGHTNESS EUV SOURCE AND METHOD FOR GENERATING EUV RADIATION
ASTAKHOV, Dmitrii Igorevich, GLUSHKOV, Denis Aleksandrovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 20.07.2023
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Year of Publication 20.07.2023
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SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE
GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 12.07.2023
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Year of Publication 12.07.2023
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HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATING AND COLLECTING RADIATION
GLUSHKOV, Denis Aleksandrovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 11.05.2023
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Year of Publication 11.05.2023
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X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET
SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir
Year of Publication 29.09.2022
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Year of Publication 29.09.2022
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X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET
SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir
Year of Publication 04.05.2022
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Year of Publication 04.05.2022
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