Advanced activation trends for boron and arsenic by combinations of single, multiple flash anneals and spike rapid thermal annealing
Lerch, W., Paul, S., Niess, J., McCoy, S., Gelpey, J., Cristiano, F., Severac, F., Fazzini, P., Martinez-Limia, A., Pichler, P., Kheyrandish, H., Bolze, D.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
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Journal Article
Evidence of the carrier mobility degradation in highly B-doped ultra-shallow junctions by Hall effect measurements
Séverac, F., Cristiano, F., Bedel-Pereira, E., Lerch, W., Paul, S., Kheyrandish, H.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
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Journal Article
Experimental investigations and simulation of the deactivation of arsenic during thermal processes after activation by SPER and spike annealing
Martinez-Limia, A., Pichler, P., Lerch, W., Paul, S., Kheyrandish, H., Pakfar, A., Tavernier, C.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
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Journal Article
Modelling of Boron Trapping at End-of-Range defects in pre-amorphized ultra-shallow junctions
Bazizi, E.M., Fazzini, P.F., Zechner, C., Tsibizov, A., Kheyrandish, H., Pakfar, A., Ciampolini, L., Tavernier, C., Cristiano, F.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
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Journal Article
Evolution of end-of-range defects in silicon-on-insulator substrates
Fazzini, P.F., Cristiano, F., Dupré, C., Paul, S., Ernst, T., Kheyrandish, H., Bourdelle, K.K., Lerch, W.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
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Journal Article
Temperature Profiles During Millisecond Processing
Camm, David M., Gelpey, J.C., McCoy, S, Stuart, G., Kheyrandish, H
Published in ECS transactions (24.10.2008)
Published in ECS transactions (24.10.2008)
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Journal Article
Wavelength-dispersive x-ray microanalysis as a novel method for studying magnesium doping in gallium nitride epitaxial films
Deatcher, C J, Bejtka, K, Martin, R W, Romani, S, Kheyrandish, H, Smith, L M, Rushworth, S A, Liu, C, Cheong, M G, Watson, I M
Published in Semiconductor science and technology (01.09.2006)
Published in Semiconductor science and technology (01.09.2006)
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Journal Article
Transient enhanced diffusion and deactivation of ion-implanted As in strained Si
Dilliway, G.D.M., Smith, A.J., Hamilton, J.J., Benson, J., Xu, Lu, McNally, P.J., Cooke, G., Kheyrandish, H., Cowern, N.E.B.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2005)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2005)
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Journal Article
Charge compensation using optical conductivity enhancement and simple analytical protocols for SIMS of resistive Si1−xGex alloy layers
Dowsett, M.G., Morris, R., Chou, Pei-Fen, Corcoran, S.F., Kheyrandish, H., Cooke, G.A., Maul, J.L., Patel, S.B.
Published in Applied surface science (15.01.2003)
Published in Applied surface science (15.01.2003)
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Journal Article
Passivation thresholds in iron-chromium alloys prepared by ion-beam sputtering
Fujimoto, S., Newman, R.C., Smith, G.S., Kaye, S.P., Kheyrandish, H., Colligon, J.S.
Published in Corrosion science (1993)
Published in Corrosion science (1993)
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Journal Article
Conference Proceeding
New mechanisms in photo-assisted MOVPE of II-VI semiconductors
Irvine, S. J. C., Stafford, A., Ahmed, M. U., Brown, A., Kheyrandish, H.
Published in Journal of electronic materials (01.06.1997)
Published in Journal of electronic materials (01.06.1997)
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Journal Article
Composition and chemical state of titanium nitride films obtained by different methods
Colligon, J.S., Kheyrandish, H., Lesnevsky, L.N., Naumkin, A., Rogozin, A., Shkarban, I.I., Vasilyev, L., Yurasova, V.E.
Published in Surface & coatings technology (01.11.1994)
Published in Surface & coatings technology (01.11.1994)
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Journal Article
The modification of alloys by low energy ion-assisted deposition
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Journal Article
Conference Proceeding
Ion beam modification of the physical properties of MoSx films
KAYE, S. P, KHEYRANDISH, H, COLLIGON, J. S, ROBERTS, E. W
Published in Thin solid films (15.05.1993)
Published in Thin solid films (15.05.1993)
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Conference Proceeding
Journal Article
Quantitative secondary neutral mass spectroscopy of thin films
Colligon, J.S., Kheyrandish, H., Walls, J.M., Wolstenholme, J.
Published in Thin solid films (15.05.1991)
Published in Thin solid films (15.05.1991)
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Journal Article
Ion-beam-induced SbSi mixing
Kheyrandish, H., Colligon, J.S., Karpuzov, D.S., Hussein, N.A.K.
Published in Thin solid films (01.03.1989)
Published in Thin solid films (01.03.1989)
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Journal Article