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Carrier head having location optimized vacuum holes
by
ZHOU REN
,
PHAM XUYEN
,
KHAVINSON RAISA
Year of Publication
23.11.2004
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Carrier head having location optimized vacuum holes
by
Pham, Xuyen
,
Zhou, Ren
,
Khavinson
,
Raisa
Year of Publication
23.11.2004
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Patent
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Format
Patent
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Subject Area
chemistry
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medicine
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sciences
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Topic
dressing or conditioning of abrading surfaces
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feeding of grinding, polishing, or lapping agents
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grinding
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machines, devices, or processes for grinding or polishing
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performing operations
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polishing
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English
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