Study of Agglomeration Behavior of Chemical Mechanical Polishing Slurry under Controlled Shear Environments
J. Khanna, Aniruddh, Gupta, Sushant, Kumar, Purushottam, Chang, Feng-Chi, Singh, Rajiv K.
Published in ECS journal of solid state science and technology (01.01.2018)
Published in ECS journal of solid state science and technology (01.01.2018)
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Journal Article
Methodology for pad conditioning sweep optimization for advanced nodes
Khanna, Aniruddh J., Jawali, Puneet, Redfield, Daniel, Kakireddy, Raghava, Chockalingam, Ashwin, Benvegnu, Dominic, Yang, Mo, Rozo, Sebastian, Fung, Jason, Cornejo, Mario, Abramson, Igor, Yamamura, Mayu, Yuan, Zhibo, Bajaj, Rajeev
Published in Microelectronic engineering (15.08.2019)
Published in Microelectronic engineering (15.08.2019)
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Journal Article
Investigation of the Impact of Pad Surface Texture from Different Pad Conditioners on the CMP Performance
Khanna, Aniruddh J., Yamamura, Mayu, Kakireddy, Veera Raghava, Chockalingam, Ashwin, Jawali, Puneet, Baradanahalli Kenchappa, Nandan, Hariharan, Venkat, Redfield, Daniel, Bajaj, Rajeev
Published in ECS journal of solid state science and technology (03.08.2020)
Published in ECS journal of solid state science and technology (03.08.2020)
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Journal Article
Engineering Surface Texture of Pads for Improving CMP Performance of Sub-10 nm Nodes
Khanna, Aniruddh J., Kakireddy, Veera Raghava, Fung, Jason, Yamamura, Mayu, Jawali, Puneet, Chockalingam, Ashwin, Baradanahalli Kenchappa, Nandan, Redfield, Daniel, Bajaj, Rajeev
Published in ECS journal of solid state science and technology (12.10.2020)
Published in ECS journal of solid state science and technology (12.10.2020)
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Journal Article
High-Performance Pad Conditioning (HPPC) Arm for Augmenting CMP Performance
Khanna, Aniruddh J., Kakireddy, Veera Raghava, Fung, Jason, Jawali, Puneet, Yamamura, Mayu, Baradanahalli Kenchappa, Nandan, Hariharan, Venkat, Redfield, Daniel, Bajaj, Rajeev
Published in ECS journal of solid state science and technology (03.08.2020)
Published in ECS journal of solid state science and technology (03.08.2020)
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Journal Article
Impact of Pad Material Properties on CMP Performance for Sub-10nm Technologies
Khanna, Aniruddh J., Kakireddy, Raghava, Jawali, Puneet, Chockalingam, Ashwin, Redfield, Daniel, Bajaj, Rajeev, Fung, Jason, Cornejo, Mario, Yamamura, Mayu, Yuan, Zhibo, Orilall, Chris, Fu, Boyi, Ganapathi, Gana, Redeker, Fred C, Patibandla, Nag B
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
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Journal Article
Analysis of light out-coupling from microlens array
Kumar, Purushottam, Khanna, Aniruddh, Son, Seung-Young, Lee, Jae Seok, Singh, Rajiv K.
Published in Optics communications (01.09.2011)
Published in Optics communications (01.09.2011)
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Journal Article
Surface Shaping Using Chemical Mechanical Polishing
Kumar, Purushottam, Son, Seung-Young, Khanna, Aniruddh, Lee, Jaeseok, Singh, Rajiv K.
Published in Journal of the Electrochemical Society (2011)
Published in Journal of the Electrochemical Society (2011)
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Journal Article
선택적으로 배열된 다공성을 갖는 연마 패드들
MANZONIE ADAM WADE, JAWALI PUNEET NARENDRA, BAJAJ RAJEEV, BARADANAHALLI KENCHAPPA NANDAN, KAKIREDDY VEERA RAGHAVA REDDY, KHANNA ANIRUDDH JAGDISH, KIM JAESEOK, FUNG JASON G, YAMAMURA MAYU, AN JOONHO
Year of Publication 12.08.2022
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Year of Publication 12.08.2022
Patent
POLISHING PADS PRODUCED BY AN ADDITIVE MANUFACTURING PROCESS
FU BOYI, CHOCKALINGAM ASHWIN, YAMAMURA MAYU FELICIA, PATIBANDLA NAG B, DAVENPORT ROB, ORILALL MAHENDRA C, KHANNA ANIRUDDH JAGDISH, FUNG JASON G, KUMAR ASHAVANI, HARIHARAN VENKATACHALAM, CORNEJO MARIO, KAKIREDDY RAGHAVA, BAJAJ RAJEEV, NG HOU TEE, SINHA AMRITANSHU, REDFIELD DANIEL, MENK GREGORY E, REDEKER FRED C
Year of Publication 03.11.2022
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Year of Publication 03.11.2022
Patent
POLISHING PADS PRODUCED BY AN ADDITIVE MANUFACTURING PROCESS
FU BOYI, CHOCKALINGAM ASHWIN, YAMAMURA MAYU FELICIA, PATIBANDLA NAG B, DAVENPORT ROB, ORILALL MAHENDRA C, KHANNA ANIRUDDH JAGDISH, FUNG JASON G, KUMAR ASHAVANI, HARIHARAN VENKATACHALAM, CORNEJO MARIO, KAKIREDDY RAGHAVA, BAJAJ RAJEEV, NG HOU TEE, SINHA AMRITANSHU, REDFIELD DANIEL, MENK GREGORY E, REDEKER FRED C
Year of Publication 01.11.2022
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Year of Publication 01.11.2022
Patent
CMP 프로세스 추적 데이터와 3D 프린팅된 CMP 소모품들을 조합하기 위한 기술들
CORNEJO MARIO, BAJAJ RAJEEV, REDFIELD DANIEL, WATKINS JOHN, FUNG JASON G, MENK GREGORY E, KHANNA ANIRUDDH
Year of Publication 27.06.2018
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Year of Publication 27.06.2018
Patent
Mn-Doped ZN2SiO^sub 4^ Phosphors Synthesis Using Flame Spray Pyrolysis
Lee, Jae Seok, Oh, Myoung Hwan, Kumar, Purushottam, Khanna, Aniruddh, Singh, Rajiv K, Ranade, Madhav B
Published in Journal of thermal spray technology (01.09.2011)
Published in Journal of thermal spray technology (01.09.2011)
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Journal Article
Mn-Doped Zn sub(2)SiO sub(4) Phosphors Synthesis Using Flame Spray Pyrolysis
Lee, Jae Seok, Oh, Myoung Hwan, Kumar, Purushottam, Khanna, Aniruddh, Singh, Rajiv K, Ranade, Madhav B
Published in Journal of thermal spray technology (01.09.2011)
Published in Journal of thermal spray technology (01.09.2011)
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Journal Article
Mn-Doped Zn2SiO4 Phosphors Synthesis Using Flame Spray Pyrolysis
Lee, Jae Seok, Oh, Myoung Hwan, Kumar, Purushottam, Khanna, Aniruddh, Singh, Rajiv K., Ranade, Madhav B.
Published in Journal of thermal spray technology (01.09.2011)
Published in Journal of thermal spray technology (01.09.2011)
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Journal Article
POLISHING PADS PRODUCED BY AN ADDITIVE MANUFACTURING PROCESS
FU BOYI, CHOCKALINGAM ASHWIN, YAMAMURA MAYU FELICIA, PATIBANDLA NAG B, DAVENPORT ROB, ORILALL MAHENDRA C, KHANNA ANIRUDDH JAGDISH, FUNG JASON G, KUMAR ASHAVANI, HARIHARAN VENKATACHALAM, CORNEJO MARIO, KAKIREDDY RAGHAVA, BAJAJ RAJEEV, NG HOU TEE, SINHA AMRITANSHU, REDFIELD DANIEL, MENK GREGORY E, REDEKER FRED C
Year of Publication 23.06.2017
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Year of Publication 23.06.2017
Patent
POLISHING PADS PRODUCED BY AN ADDITIVE MANUFACTURING PROCESS
FU BOYI, CHOCKALINGAM ASHWIN, YAMAMURA MAYU FELICIA, PATIBANDLA NAG B, DAVENPORT ROB, ORILALL MAHENDRA C, KHANNA ANIRUDDH JAGDISH, FUNG JASON G, KUMAR ASHAVANI, HARIHARAN VENKATACHALAM, CORNEJO MARIO, KAKIREDDY RAGHAVA, BAJAJ RAJEEV, NG HOU TEE, SINHA AMRITANSHU, REDFIELD DANIEL, MENK GREGORY E, REDEKER FRED C
Year of Publication 23.06.2017
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Year of Publication 23.06.2017
Patent
Synthesis and Characterization of Zn 2 SiO 4 :Mn 2+ Nanophosphors Prepared from Different Zn Source in Liquid Precursor by Flame Spray Pyrolysis
Lee, Jae Seok, Khanna, Aniruddh, Oh, Myounghwan, Ranade, Madhav B., Singh, Rajiv K.
Published in ECS transactions (25.09.2009)
Published in ECS transactions (25.09.2009)
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Journal Article