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측정 광에 대한 오브젝트의 반사도를 측정하는 방법 및 이를 수행하기 위한 계측 시스템
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METHOD AND APPARATUS FOR QUALIFYING A MASK FOR USE IN LITHOGRAPHY
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Year of Publication 14.03.2024
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Method and apparatus for qualifying a mask for use in lithography
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Year of Publication 01.04.2024
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Year of Publication 01.04.2024
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Verfahren zur Qualifizierung einer Maske zum Einsatz in der Lithografie
Helbig, Tim, Niederhausen, Thomas, Capelli, Renzo, Koch, Markus, Hoffmann, Sandro, Kersteen, Grizelda, Verch, Andreas
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
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