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"KENT, ROSSMANN"
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"KENT, ROSSMANN"
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Method for reducing contaminant concentration in plasma chambers
by
LAXMAN, MURUGESH
,
TURGUT, SAHIN
,
PRAVIN, NARWANKAR
,
KENT
,
ROSSMANN
Year of Publication
12.12.2001
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Reduction in mobile ion and metal contamination by varying season time and bias RF power during chamber cleaning
by
NARWANKAR, PRAVIN
,
MURUGESH, LAXMAN
,
ROSSMANN
,
KENT
,
SAHIN, TURGUT
Year of Publication
11.07.2000
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METHOD FOR REDUCING CONTAMINATION WITH MOBILE ION AND METAL BY CHANGING AGING TIME AND BIAS RF POWER DURING CLEANING OF CHAMBER AND DEVICE THEREFOR
by
PRAVIN NARWANKAR
,
TURGUT SAHIN
,
KENT ROSSMANN
,
LAXMAN MURUGESH
Year of Publication
07.04.1998
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Method for reducing contaminants in plasma chambers
by
LAXMAN, MURUGESH
,
TURGUT, SAHIN
,
PRAVIN, NARWANKAR
,
KENT
,
ROSSMANN
Year of Publication
25.02.1998
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REDUCTION OF ION MIGRATION AND METAL CONTAMINATION IN HDP-CVD CHAMBER USING CHAMBER SEASONING FILM DEPOSITION
by
KENT ROSSMANN
,
TURGUT SAHIN
,
M SAAD HI
,
NOWAK ROMOULD
Year of Publication
22.01.1999
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Verfahren zur Reduzierung der Kontaminierungspartikel in Plasmakammern
by
LAXMAN, MURUGESH
,
TURGUT, SAHIN
,
PRAVIN, NARWANKAR
,
KENT
,
ROSSMANN
Year of Publication
02.01.2003
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basic electric elements
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