MULTI-REGIME PLASMA WAFER PROCESSING TO INCREASE ION DIRECTIONALITY
KENNETH LUCCHESI, ALEXEI MARAKHTANOV, JOHN PATRICK HOLLAND, FELIX KOZAKEVICH, CHEN ZHIGANG, ZHAO LIN
Year of Publication 04.04.2019
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Year of Publication 04.04.2019
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SYSTEMS AND METHODS FOR ACHIEVING PREDETERMINED FACTOR ASSOCIATED WITH EDGE REGION WITHIN PLASMA CHAMBER BY SYNCHRONIZING MAIN AND EDGE RF GENERATORS
KENNETH LUCCHESI, ALEXEI MARAKHTANOV, JOHN PATRICK HOLLAND, FELIX KOZAKEVICH, MICHAEL C KELLOGG, CHEN ZHIGANG, ZHAO LIN
Year of Publication 15.02.2018
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Year of Publication 15.02.2018
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SYSTEMS AND METHODS FOR CONTROLLING AN LF RF PULSE GENERATOR TO INCREASE SELECTIVITY
RIGHETTI, Fabio, ZHAO, Lin, HOLLAND, John, MARAKHTANOV, Alexei, LUCCHESI, Kenneth
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
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Systems and methods for cleaning an edge ring pocket
Lucchesi, Kenneth, Briggs, Scott, Kozakevich, Felix Leib, Holland, John, Hudson, Eric, Marakhtanov, Alexei
Year of Publication 19.03.2024
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Year of Publication 19.03.2024
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SYSTEMS AND METHODS FOR CONTROLLING A PULSE WIDTH OF A SQUARE PULSE WAVEFORM
MARAKHTANOV, Alexei M, ZHAO, Lin, HOLLAND, John P, LUCCHESI, Kenneth, HUDSON, Eric A, KIM, Bongseong, BELAU, Leonid
Year of Publication 02.05.2024
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Year of Publication 02.05.2024
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Optimization of Radiofrequency Signal Ground Return in Plasma Processing System
Bhowmick, Ranadeep, Kozakevich, Felix, Lucchesi, Kenneth, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 23.02.2023
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Year of Publication 23.02.2023
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PLASMA SYSTEMS AND METHODS FOR USING SQUARE-SHAPED PULSE SIGNALS
RIGHETTI, Fabio, DORAI, Rajesh, ZHAO, Lin, BENNET, Alexander, HOLLAND, John, PATRICK, Roger, MARAKHTANOV, Alexei, LUCCHESI, Kenneth
Year of Publication 26.01.2023
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Year of Publication 26.01.2023
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SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET
Lucchesi, Kenneth, Briggs, Scott, Kozakevich, Felix Leib, Holland, John, Hudson, Eric, Marakhtanov, Alexei
Year of Publication 11.08.2022
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Year of Publication 11.08.2022
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Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
Kozakevich, Felix, Lucchesi, Kenneth, Zhao, Lin, Holland, John Patrick, Chen, Zhigang, Marakhtanov, Alexei, Kellogg, Michael C
Year of Publication 07.12.2021
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Year of Publication 07.12.2021
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OPTIMIZATION OF RADIOFREQUENCY SIGNAL GROUND RETURN IN PLASMA PROCESSING SYSTEM
KOZAKEVICH, Felix, HOLLAND, John, JI, Bing, BHOWMICK, Ranadeep, MARAKHTANOV, Alexei, LUCCHESI, Kenneth
Year of Publication 12.08.2021
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Year of Publication 12.08.2021
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Active control of radial etch uniformity
Lucchesi, Kenneth, Kozakevich, Felix Leib, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 09.02.2021
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Year of Publication 09.02.2021
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SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET
BRIGGS, Scott, KOZAKEVICH, Felix, HOLLAND, John, MARAKHTANOV, Alexei, LUCCHESI, Kenneth, HUDSON, Eric
Year of Publication 04.02.2021
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Year of Publication 04.02.2021
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Uniformity control circuit for use within an impedance matching circuit
Kozakevich, Felix, Lucchesi, Kenneth, Holland, John Patrick, Marakhtanov, Alexei
Year of Publication 30.10.2018
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Year of Publication 30.10.2018
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