New top and bottom electrodes for SrBi2Ta2O9 ferroelectric capacitors
Katori, Kenji, Nagel, Nicolas, Watanabe, Koji, Tanaka, Masahiro, Yamoto, Hisayoshi, Yagi, Hajime
Published in Integrated ferroelectrics (01.09.1997)
Published in Integrated ferroelectrics (01.09.1997)
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Journal Article
Development of a new annealing process to allow new top electrode materials for SrBi2Ta2O9 capacitors
Watanabe, Koji, Tanaka, Masahiro, Nagel, Nicolas, Katori, Kenji, Sugiyama, Masataka, Yamoto, Hisayoshi, Yagi, Hajime
Published in Integrated ferroelectrics (01.09.1997)
Published in Integrated ferroelectrics (01.09.1997)
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Journal Article
Tapered polymer waveguides with graded-index core for low-loss optical VIA
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Conference Proceeding