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Year of Publication 16.04.2024
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RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
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Year of Publication 05.04.2024
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Year of Publication 08.02.2024
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RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
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Year of Publication 13.12.2022
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Year of Publication 28.06.2022
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RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
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Year of Publication 12.04.2022
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Year of Publication 07.11.2022
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RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
MACE ADAM, MARAKHTANOV ALEXEI, HOLLAND JOHN, KELLOGG MICHAEL C, MATYUSHKIN ALEXANDER, CHEN ZHIGANG, KOZAKEVICH FELIX
Year of Publication 20.01.2021
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Year of Publication 20.01.2021
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Year of Publication 23.07.2020
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Year of Publication 23.07.2020
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RF RF SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATED WITH AN EDGE REGION WITHIN A PLASMA CHAMBER BY SYNCHRONIZING MAIN AND EDGE RF GENERATORS
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Year of Publication 02.02.2018
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MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHNIQUES AND USE CASES THEREFOR
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Year of Publication 23.06.2017
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Year of Publication 23.06.2017
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Year of Publication 24.04.2017
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Year of Publication 24.04.2017
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