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"KELLEHER, HOLLIE ANN"
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FABRICATION OF SEMICONDUCTOR DEVICES WITH AIR GAPS FOR ULTRA LOW CAPACITANCE INTERCONNECTION STRUCTURES
by
KOHL, PAUL, ALBERT
,
BHUSARI, DHANANJAY, M
,
KELLEHER
,
HOLLIE ANN
,
HENDERSON, CLIFFORD, LEE
,
ALLEN, SUE, ANN, BIDSTRUP
Year of Publication
25.11.2009
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FABRICATION OF SEMICONDUCTOR DEVICES WITH AIR GAPS FOR ULTRA LOW CAPACITANCE INTERCONNECTION STRUCTURES
by
KOHL, PAUL, ALBERT
,
BHUSARI, DHANANJAY, M
,
KELLEHER
,
HOLLIE ANN
,
HENDERSON, CLIFFORD, LEE
,
ALLEN, SUE, ANN, BIDSTRUP
Year of Publication
15.10.2003
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Patent
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chemistry
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basic electric elements
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electric solid state devices not otherwise provided for
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electricity
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semiconductor devices
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esp@cenet
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