Polishing pad surface morphology and chemical mechanical planarization
CASTILLO-MEJIA, D, KELCHNER, J, BEAUDOIN, S
Published in Journal of the Electrochemical Society (2004)
Published in Journal of the Electrochemical Society (2004)
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Study on the Mechanical Properties of CMP Pads
Bum Soo Kim, Tucker, M.H., Kelchner, J.D., Beaudoin, S.P.
Published in IEEE transactions on semiconductor manufacturing (01.08.2008)
Published in IEEE transactions on semiconductor manufacturing (01.08.2008)
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Experimental autologous immune deposit nephritis in rats associated with mercuric chloride administration
Kelchner, J, McIntosh, J R, Boedecker, E, Guggenheim, S, McIntosh, R M
Published in Experientia (15.09.1976)
Published in Experientia (15.09.1976)
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