CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR
KEIL DOUGLAS L, MOHAMED SABRI, AUGUSTYNIAK EDWARD, LINGAMPALLI RAMKISHAN RAO, LEESER KARL, BARNETT CODY
Year of Publication 07.06.2023
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Year of Publication 07.06.2023
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CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR
KEIL DOUGLAS L, MOHAMED SABRI, AUGUSTYNIAK EDWARD, LINGAMPALLI RAMKISHAN RAO, LEESER KARL, BARNETT CODY
Year of Publication 21.06.2022
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Year of Publication 21.06.2022
Patent
CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR
KEIL DOUGLAS L, MOHAMED SABRI, AUGUSTYNIAK EDWARD, LINGAMPALLI RAMKISHAN RAO, LEESER KARL, BARNETT CODY
Year of Publication 04.03.2021
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Year of Publication 04.03.2021
Patent
CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR
KEIL DOUGLAS L, MOHAMED SABRI, AUGUSTYNIAK EDWARD, LINGAMPALLI RAMKISHAN RAO, LEESER KARL, BARNETT CODY
Year of Publication 05.09.2014
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Year of Publication 05.09.2014
Patent