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A showerhead for thin-film deposition and the thin-film deposition apparatus containing the same
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Year of Publication 01.01.2017
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A showerhead for thin-film deposition and the thin-film deposition apparatus containing the same
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Year of Publication 01.07.2017
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Batch type thin film coating process system
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Year of Publication 11.04.2017
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Year of Publication 21.02.2016
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Year of Publication 21.02.2016
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A GAS INLET ARRAY FOR ATOMIC LAYER DEPOSITION SYSTEM
WEI, ZHAO-NAN, NI, GUO-YU, BO, HUI-YUN, XIAO, MING-HUA, YU, YOU-XUAN, LIANG, SHIANG, LI, WEN-JIE, LIN, JUN-TING, KE, ZHI-ZHONG
Year of Publication 21.02.2017
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Year of Publication 21.02.2017
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Thin-film deposition apparatus
ZHUO, WEN-HAO, CHEN, SHAU-YI, LIU, AI-SEN, CHEN, FENG-ZHI, LIN, CHIEN-BAO, KE, ZHI-ZHONG
Year of Publication 21.11.2015
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Year of Publication 21.11.2015
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Plasma-assisted atomic layer deposition system
ZHUO, WEN-HAO, XIAO, JIAN-NAN, LIU, BO-HENG, CAI, MENG-YAN, KE, ZHI-ZHONG, LIU, DA-REN, YOU, ZHI-JIE
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Year of Publication 01.02.2013
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Resistive radiation heater fabricated by linear cutting electric discharge machining
LIN, CHUN-TANG, GUO, SHOU-YI, SHIAU, JIAN-NAN, HUANG, JIAN-YAU, CHEN, FENG-ZHI, KE, ZHI-ZHONG
Year of Publication 01.06.2006
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Year of Publication 01.06.2006
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