Formation of Cobalt and Cobalt-Silicide Nanodots on Ultrathin SiO2 Induced by Remote Hydrogen Plasma
Kawanami, Akira, Makihara, Katsunori, Ikeda, Mitsuhisa, Miyazaki, Seiichi
Published in Jpn J Appl Phys (01.08.2010)
Published in Jpn J Appl Phys (01.08.2010)
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Light-Induced Carrier Transfer in NiSi-Nanodots/Si-Quantum-Dots Hybrid Floating Gate in Metal--Oxide--Semiconductor Structures
Morisawa, Naoya, Ikeda, Mitsuhisa, Nakanishi, Sho, Kawanami, Akira, Makihara, Katsunori, Miyazaki, Seiichi
Published in Japanese Journal of Applied Physics (01.04.2010)
Published in Japanese Journal of Applied Physics (01.04.2010)
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Nucleation Control for High Density Formation of Si-based Quantum Dots on Ultrathin SiO2
Makihara, Katsunori, Kawanami, Akira, Ikeda, Mitsuhisa, Higashi, Seiichiro, Miyazaki, S.
Published in ECS transactions (03.10.2008)
Published in ECS transactions (03.10.2008)
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