Pulsed Green-Laser Annealing for Single-Crystalline Silicon Film Transferred onto Silicon wafer and Non-alkaline Glass by Hydrogen-Induced Exfoliation
Kawaguchi, Norihito, Kawakami, Ryusuke, Nishida, Ken-ichiro, Yamamoto, Naoya, Masaki, Miyuki, Yoshinouchi, Atsushi
Published in Japanese Journal of Applied Physics (01.01.2007)
Published in Japanese Journal of Applied Physics (01.01.2007)
Get full text
Journal Article
Evaluation of poly-Si thin film crystallized by solid green laser annealing using UV/visible Raman spectroscopy
Ogura, Atsushi, Kakemura, Yasuto, Kosemura, Daisuke, Yoshida, Tetsuya, Masaki, Miyuki, Nishida, Kenichirou, Kawakami, Ryusuke, Yamamoto, Naoya
Published in Journal of materials science. Materials in electronics (01.12.2008)
Published in Journal of materials science. Materials in electronics (01.12.2008)
Get full text
Journal Article
Conference Proceeding
LASER ANNEAL METHOD AND DEVICE
MASAKI MIYUKI, MORITA MASARU, KAWAGUCHI NORIHITO, NISHIDA KENICHIRO, KAWAKAMI RYUSUKE
Year of Publication 24.10.2011
Get full text
Year of Publication 24.10.2011
Patent
METHOD AND APPARATUS FOR LASER ANNEALING
MASAKI MIYUKI, MORITA MASARU, KAWAGUCHI NORIHITO, NISHIDA KENICHIRO, KAWAKAMI RYUSUKE
Year of Publication 03.03.2011
Get full text
Year of Publication 03.03.2011
Patent
LASER ANNEAL METHOD AND DEVICE
MASAKI MIYUKI, MORITA MASARU, KAWAGUCHI NORIHITO, NISHIDA KENICHIRO, KAWAKAMI RYUSUKE
Year of Publication 25.08.2010
Get full text
Year of Publication 25.08.2010
Patent
METHOD AND APPARATUS FOR LASER ANNEALING
MORITA MASARU, KAWAKAMI RYUSUKE, KAWAGUCHI NORIHITO, NISHIDA KENICHIRO, MASAKI MIYUKI
Year of Publication 30.12.2009
Get full text
Year of Publication 30.12.2009
Patent
LASER ANNEAL METHOD AND DEVICE
MORITA, MASARU, KAWAGUCHI, NORIHITO, NISHIDA, KENICHIRO, MASAKI, MIYUKI, KAWAKAMI, RYUSUKE
Year of Publication 16.07.2009
Get full text
Year of Publication 16.07.2009
Patent
LASER ANNEALING DEVICE
IZAWA JUN, MASAKI MIYUKI, MORITA MASARU, KAWAGUCHI NORIHITO, NISHIDA KENICHIRO, KAWAKAMI RYUSUKE
Year of Publication 07.03.2011
Get full text
Year of Publication 07.03.2011
Patent
LASER ANNEALING METHOD AND LASER ANNEALING APPARATUS
MASAKI MIYUKI, MORITA MASARU, YOSHINOUCHI ATSUSHI, KAWAGUCHI NORIHITO, NISHIDA KENICHIRO, KAWAKAMI RYUSUKE
Year of Publication 13.01.2011
Get full text
Year of Publication 13.01.2011
Patent
LASER ANNEALING METHOD AND LASER ANNEALING APPARATUS
KAWAGUCHI, NORIHITO, NISHIDA, KENICHIRO, MASAKI, MIYUKI, KAWAKAMI, RYUSUKE
Year of Publication 19.07.2007
Get full text
Year of Publication 19.07.2007
Patent
LASER ANNEALING METHOD AND DEVICE
KAWAGUCHI, NORIHITO, NISHIDA, KENICHIRO, MASAKI, MIYUKI, YOSHINOUCHI, ATSUSHI, KAWAKAMI, RYUSUKE
Year of Publication 22.03.2007
Get full text
Year of Publication 22.03.2007
Patent
LASER ANNEALING DEVICE
MORITA MASARU, KAWAKAMI RYUSUKE, IZAWA JUN, KAWAGUCHI NORIHITO, NISHIDA KENICHIRO, MASAKI MIYUKI
Year of Publication 07.01.2010
Get full text
Year of Publication 07.01.2010
Patent
LASER ANNEALING METHOD AND LASER ANNEALING APPARATUS
MORITA, MASARU, KAWAGUCHI, NORIHITO, NISHIDA, KENICHIRO, MASAKI, MIYUKI, YOSHINOUCHI, ATSUSHI, KAWAKAMI, RYUSUKE
Year of Publication 17.12.2009
Get full text
Year of Publication 17.12.2009
Patent
Improvement in Characteristics of Thin Film Transistors upon High-Pressure Steam Annealing
Yamamoto, Naoya, Watanabe, Tomoyuki, Masaki, Miyuki, Kawakami, Ryusuke, Murayama, Takahiko, Ohshita, Yoshio, Ogura, Atsushi, Yoshinouchi, Atsushi
Published in Japanese Journal of Applied Physics (01.11.2007)
Published in Japanese Journal of Applied Physics (01.11.2007)
Get full text
Journal Article