Measurements of spatial distributions of electron density and temperature of 450 MHz UHF plasma using laser Thomson scattering
Pan, Yiming, Tomita, Kentaro, Kawai, Yoshinobu, Matsukuma, Masaaki, Uchino, Kiichiro
Published in Japanese Journal of Applied Physics (01.01.2021)
Published in Japanese Journal of Applied Physics (01.01.2021)
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Journal Article
Simulation of spatial characteristics of very high frequency hydrogen plasma produced by a balanced power feeding
Ogiwara, Kohei, Chen, Weiting, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Thin solid films (29.11.2013)
Published in Thin solid films (29.11.2013)
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Journal Article
Conference Proceeding
Two-dimensional simulations of multi-hollow VHF SiH4/H2 plasma
Su, Li-Wen, Chen, Weiting, Uchino, Kiichiro, Kawai, Yoshinobu
Published in AIP advances (01.02.2018)
Published in AIP advances (01.02.2018)
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Journal Article
Simulation of balanced power feeding plasma surrounded by a metal box
Ogiwara, Kohei, Chen, Weiting, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (01.01.2015)
Published in Japanese Journal of Applied Physics (01.01.2015)
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Journal Article
Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation
Chen, Kuan-Chen, Chiu, Kuo-Feng, Ogiwara, Kohei, Su, Li-Wen, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (09.11.2016)
Published in Japanese Journal of Applied Physics (09.11.2016)
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Journal Article
Mechanism of VHF H2 plasma production at high pressures
Chen, Kuan-Chen, Chiu, Kuo-Feng, Chen, Chia-Fu, Lien, Cheng-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (20.05.2016)
Published in Japanese Journal of Applied Physics (20.05.2016)
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Journal Article
Axial distribution of a VHF H2 plasma produced by a narrow gap discharge
Chen, Kuan-Chen, Chen, Chia-Fu, Lien, Cheng-Yang, Chiu, Kuo-Feng, Shi, Jen-Bin, Tsai, Yu-Jer, Lien, Ting-Kuei, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (01.01.2016)
Published in Japanese Journal of Applied Physics (01.01.2016)
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Journal Article
Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge
Chen, Kuan-Chen, Chiu, Kuo-Feng, Chen, Chia-Fu, Lien, Cheng-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei, Matsunaga, Fumihiko, Tanaka, Masaaki, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Plasma processes and polymers (01.06.2016)
Published in Plasma processes and polymers (01.06.2016)
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Journal Article
Production of a uniform VHF H2 plasma by a narrow-gap discharge
Lien, Cheng-Yang, Chen, Chia-Fu, Yang, Ching-Lung, Kawai, Yoshinobu, Chiu, Kuo-Feng, Shi, Jen-Bin, Wang, Jui-Hao, Lien, Shui-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei
Published in Vacuum (01.11.2015)
Published in Vacuum (01.11.2015)
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Journal Article
Development of radially movable multichannel Reynolds stress probe system for a cylindrical laboratory plasma
Nagashima, Yoshihiko, Inagaki, Shigeru, Kamakaki, Kunihiro, Arakawa, Hiroyuki, Yamada, Takuma, Shinohara, Shunjiro, Kawai, Yoshinobu, Yagi, Masatoshi, Fujisawa, Akihide, Itoh, Sanae-I, Itoh, Kimitaka, Takase, Yuichi
Published in Review of scientific instruments (01.03.2011)
Published in Review of scientific instruments (01.03.2011)
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Journal Article
High-rate growth of microcrystalline silicon films using a high-density SiH4/H2 glow-discharge plasma
NIIKURA, Chisato, ITAGAKI, Naho, KONDO, Michio, KAWAI, Yoshinobu, MATSUDA, Akihisa
Published in Thin solid films (01.06.2004)
Published in Thin solid films (01.06.2004)
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Conference Proceeding
Journal Article
Effect of Excitation Frequency on the Spatial Distributions of a Surface Wave Plasma
Muta, Hiroshi, Nishida, Satoshi, Kuribayashi, Shizuma, Yoshikawa, Naoki, Komatsu, Ryota, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (01.01.2011)
Published in Japanese Journal of Applied Physics (01.01.2011)
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Journal Article
Effect of Excitation Frequency on the Spatial Distributions of a Surface Wave Plasma
Muta, Hiroshi, Nishida, Satoshi, Kuribayashi, Shizuma, Yoshikawa, Naoki, Komatsu, Ryota, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (01.01.2011)
Published in Japanese Journal of Applied Physics (01.01.2011)
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Journal Article
Diagnostics of VHF Argon Plasmas by Laser Thomson Scattering
CHEN, Weiting, OGIWARA, Kohei, KOGE, Koichiro, TOMITA, Kentaro, UCHINO, Kiichiro, KAWAI, Yoshinobu
Published in Plasma and Fusion Research (2013)
Published in Plasma and Fusion Research (2013)
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Journal Article
Behavior of the Ion Sheath Instability in a Negative Ion Plasma
Kazunori Koga, Kazunori Koga, Yoshinobu Kawai, Yoshinobu Kawai
Published in Japanese Journal of Applied Physics (01.03.1999)
Published in Japanese Journal of Applied Physics (01.03.1999)
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Journal Article