Flat and Large Poly-Si Grains by a Continuous Process of Plasma-Enhanced Chemical Vapor Deposition of a-Si and Its Direct Laser Crystallization
Mimura, Akio, Shinagawa, Youmei, Kawachi, Genshirou, Onisawa, Kenichi, Minemura, Tetsurou, Hara, Masayuki, Ishida, Takeshige, Takeda, Tomohiko
Published in Japanese Journal of Applied Physics (01.08.2000)
Published in Japanese Journal of Applied Physics (01.08.2000)
Get full text
Journal Article
THIN FILM TRANSISTOR DEVICE AND METHOD FOR PRODUCING THIN FILM TRANSISTOR DEVICE
KANEGAE, ARINOBU, KAWASHIMA, TAKAHIRO, HAYASHI, HIROSHI, KAWACHI, GENSHIROU
Year of Publication 03.01.2013
Get full text
Year of Publication 03.01.2013
Patent
THIN FILM TRANSISTOR DEVICE AND METHOD FOR PRODUCING THIN FILM TRANSISTOR DEVICE
KANEGAE, ARINOBU, KAWASHIMA, TAKAHIRO, HAYASHI, HIROSHI, KAWACHI, GENSHIROU
Year of Publication 03.01.2013
Get full text
Year of Publication 03.01.2013
Patent
THIN FILM TRANSISTOR DEVICE AND METHOD FOR PRODUCING THIN FILM TRANSISTOR DEVICE
KANEGAE, ARINOBU, KAWASHIMA, TAKAHIRO, HAYASHI, HIROSHI, KAWACHI, GENSHIROU
Year of Publication 03.01.2013
Get full text
Year of Publication 03.01.2013
Patent
THIN-FILM TRANSISTOR AND METHOD OF MANUFACTURING THIN-FILM TRANSISTOR
KANEGAE, ARINOBU, KAWASHIMA, TAKAHIRO, KISHIDA, YUJI, KAWACHI, GENSHIROU
Year of Publication 20.12.2012
Get full text
Year of Publication 20.12.2012
Patent
THIN-FILM SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
NAGAI, HISAO, SATOH, EIICHI, KAWASHIMA, TAKAHIRO, KISHIDA, YUJI, KAWACHI, GENSHIROU
Year of Publication 07.09.2012
Get full text
Year of Publication 07.09.2012
Patent
THIN-FILM SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
NAGAI, HISAO, SATOH, EIICHI, KAWASHIMA, TAKAHIRO, KISHIDA, YUJI, KAWACHI, GENSHIROU
Year of Publication 07.09.2012
Get full text
Year of Publication 07.09.2012
Patent
LIQUID CRYSTAL DISPLAY DEVICE
SATOU HIDEO, MIKAMI YOSHIROU, KONDOU KATSUMI, KAWACHI GENSHIROU, MIYAZAWA TOSHIO
Year of Publication 09.01.2003
Get full text
Year of Publication 09.01.2003
Patent